Course detail
Thin Films
FCH-DCO_FTDAcad. year: 2010/2011
Terminology; liquid phase deposition: Langmuir-Blodgett films, self-assembled films, casting methods; introduction to vacuum science and plasma chemistry; chemical vapor deposition: vacuum evaporation, sputtering, plasma polymerization, laser-enhanced CVD; thin film characterization: film growth, film thickness and deposition rate, microscopic and spectroscopic techniques, properties and applications of thin films.
Language of instruction
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Learning outcomes of the course unit
Prerequisites
Co-requisites
Planned learning activities and teaching methods
Assesment methods and criteria linked to learning outcomes
Course curriculum
Film growth
Structural analyses of films
Chemical analysis of films
Film properties
Work placements
Aims
Specification of controlled education, way of implementation and compensation for absences
Recommended optional programme components
Prerequisites and corequisites
Basic literature
M. Ohring, Materials Science of Thin Films, Academic Press 2002. (CS)
V. L. Mironov, Fundamentals of Scanning Probe Microscopy, NT-MDT 2004. (CS)
Recommended reading
Classification of course in study plans
Type of course unit
Guided consultation in combined form of studies
Teacher / Lecturer