Course detail

Microfluids and microelectromechanical systems

FEKT-MPA-MMMAcad. year: 2026/2027

The aim of the course is to provide students with a comprehensive introduction to microfluidics and microelectromechanical systems (MEMS), with a focus on their principles, design, fabrication, and practical applications.

The course combines theoretical foundations with laboratory skills in the areas of microfluidic devices, sensors, actuators, inertial sensors, microbolometers, microcalorimeters, and piezoelectric resonators, which represent key technologies in modern electrical engineering, biomedicine, and analytical applications.

Students will gain an overview of design methods, simulations, and technological processes used in the fabrication of micro- and nanosystems and will understand how their unique properties can be exploited in practice. Emphasis is placed on understanding the physical principles that enable the integration of micromechanical and electronic components into a single functional system, as well as on developing the practical competencies required for their application in both industrial and research environments.

 

Language of instruction

English

Number of ECTS credits

5

Mode of study

Not applicable.

Guarantor

doc. Ing. Imrich Gablech, Ph.D.

Department

Department of Microelectronics (UMEL)

Entry knowledge

Knowledge of manufacturing technologies at the Master’s degree level is required. Laboratory work is conditional upon holding a valid qualification as a “person knowledgeable for independent work”, which students must obtain before the start of the course. Information regarding this qualification is provided in the Dean’s Directive on Familiarisation of Students with Safety Regulations. 

Rules for evaluation and completion of the course

The requirements for successful completion of the course are specified by regulations issued by the course guarantor.

  • 30 points – laboratory exercises
  • 70 points – final examination

To successfully complete the course, students must obtain at least 50% of the points from each assessed component.

 

Aims

The aim of the course is to provide students with both fundamental and applied knowledge in the fields of microfluidics and microelectromechanical systems (MEMS). The course covers the physical principles of microscale flow, the behaviour of liquids and gases in microchannels, the operating principles of MEMS sensors and actuators, and the fundamentals of the design, simulation, and fabrication of these systems. The course combines theoretical knowledge with practical training focused on working with microfluidic devices, inertial sensors, microbolometers, microcalorimeters, and piezoelectric resonators.

The practical part of the course enables students to understand technological processes used in the fabrication of MEMS and microfluidic structures, to work with modern measurement systems, and to develop skills required for experimental laboratory work. Students will thus acquire the competencies needed to participate in research and development projects in the fields of sensing, biomedicine, analytical chemistry, and micro- and nanotechnologies.

Upon successful completion of the course, the student:

  • understands the fundamental physical principles of microfluidics, including laminar flow, diffusion, and surface phenomena, and is able to apply them in the design of microfluidic structures,
  • understands the operating principles of MEMS sensors and actuators, including inertial sensors, microbolometers, microcalorimeters, and piezoelectric resonators,
  • understands the technological processes and materials used in the fabrication of MEMS and microfluidic devices and is able to relate them to the resulting device properties,
  • is able to design and simulate simple microfluidic and MEMS structures and interpret their response,
  • is able to work with basic microfluidic systems and laboratory equipment, including measurement methods used for MEMS characterization,
  • possesses the skills required to participate in research, development, and laboratory projects in the fields of microfluidics, sensing, and microsystems technologies.
 

Study aids

Not applicable.

Prerequisites and corequisites

Not applicable.

Basic literature

Not applicable.

Recommended reading

Not applicable.

Classification of course in study plans

  • Programme MPA-NCP Master's 1 year of study, summer semester, compulsory-optional

Type of course unit

 

Individual preparation for laboratories

26 hours, optionally

Teacher / Lecturer

doc. Ing. Imrich Gablech, Ph.D.

Syllabus

Independent study of principles and instructions related to the laboratory task; familiarization with procedures, equipment, and safety requirements; preparation of calculations and materials required for performing and evaluating the task.

  

Individual preparation for a final exam

60 hours, optionally

Teacher / Lecturer

doc. Ing. Imrich Gablech, Ph.D.

Syllabus

Independent review and systematization of the topics covered during the semester; study of course materials; practice of theoretical knowledge and practical skills; solving sample tasks and comprehensive preparation for the final examination.

 

Laboratory exercise

26 hours, compulsory

Teacher / Lecturer

doc. Ing. Imrich Gablech, Ph.D.

Syllabus

1.    Design of a microfluidic chip with layouts for lithography and 3D printing

2.    Fabrication of microfluidic chips using resin 3D printing

3.    Setup of the measurement station, process automation, and functional verification via ink mixing

4.    Measurement of pressure and hydrodynamic resistance in microfluidic systems

5.    Electrochemical detection in microfluidics

6.    Fluorescence measurement in microfluidics

7.    Design of MEMS structures (bolometers, beams, and strain gauges) for lithography and their simulation in ANSYS Workbench

8.    Measurement of crystallization energy using calorimeters

9.    Measurement of infrared (IR) radiation using bolometers and a commercial IR camera

10.    Measurement using accelerometers and analysis of their properties at various pressures

11.    Weighing with gravimetric sensors and measurement of gas flow rates

 

 

Lecture

26 hours, optionally

Teacher / Lecturer

doc. Ing. Imrich Gablech, Ph.D.

Syllabus

1.    Introduction to microfluidics and MEMS

2.    Design of microfluidic structures and MEMS

3.    Physical simulation of fluid flow and MEMS structures

4.    Micromachining techniques for microfluidics and MEMS

5.    Alternative fabrication techniques (cutting, casting, etc.)

6.    3D printing in microfluidics

7.    Sealing and integration of microfluidic chips

8.    Microfluidic structures and systems (pumps, valves, mixers, reactors, etc.)

9.    Sensing methods in microfluidics

10.    Sensing methods in MEMS

11.    Contact and non-contact temperature measurement (sensors, IR cameras, calorimeters, etc.)

12.    Accelerometers, gyroscopes, and acoustic sensors 13.    Biosensors and BioMEMS