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Course detail
FEKT-MPC-DMEAcad. year: 2026/2027
Diagnostic methods for determining the properties and parameters of materials used not only in electrical engineering. Microscopic, spectroscopic, and diffractometric diagnostic methods, their physical principles, and applications. Diagnostic methods for determining the properties of semiconductor wafers and structures, as well as contamination and defects in semiconductor materials. Processing and evaluation of measured data.
Language of instruction
Number of ECTS credits
Mode of study
Guarantor
Department
Entry knowledge
Knowledge of electrical engineering materials at the level of the bachelor course “Diagnostics and Testing.” Work in the laboratory is contingent upon holding a valid “qualified person for independent work” certification, which students must obtain before the start of the course. Information regarding this certification is provided in the Dean’s Directive on Familiarizing Students with Safety Regulations.
Rules for evaluation and completion of the course
up to 40 points during the semester (10 points from laboratory seminars and 30 points from individual work and its presentation)up to 60 points from written final examFinal exam is focused on verification of knowledge and orientation in the field of diagnostics methods and organization of testing.Obligatory participation in teaching.
Aims
The aim of the course is to acquaintstudents with various diagnostic methods. Students will learn about the diagnostics of Li-Ion based electrochemical power sources, as well as the diagnostics of materials using scanning electron microscopy or environmental scanning electron microscopy, energy dispersive spectroscopy, optical microscopy, scanning probe microscopy, and X-ray diffraction. They will gain information on various physical methods used to determine the physical properties, parameters, structures, and chemical composition of various materials.
Study aids
Prerequisites and corequisites
Basic literature
Recommended reading
Classification of course in study plans
specialization RRTS , 2 year of study, winter semester, compulsory-optional
Lecture
Teacher / Lecturer
Syllabus
Optical microscopy – observations in optical microscopy, lens geometry, optical lens aberrations and their correction, properties and types of objectives, properties and types of eyepieces, characteristic values of microscopes, methods of sample observation in optical microscopy, stereoscopic observation, confocal laser microscopy
Electron microscopy methods – physics of subatomic particles, operating principles of transmission and scanning electron microscopes, electron sources, electromagnetic lenses aberration, characteristic values of microscopes, environmental scanning electron microscopy, interaction of the electron beam with solids, the EBIC method, detection systems for scanning electron microscopy.
Spectroscopy – principles of spectral excitation, spectral analysis, energy and wavelength dispersive spectroscopy, detection of characteristic X-rays, analytical methods in elemental analysis.Scanning probe microscopy – basic principles of scanning probe microscopy, principle and description of the scanning tunneling microscope, principle and description of the atomic force microscope
Electrochemical power sources
Diffraction
Tests
Laboratory exercise
Scanning electron microscopy, sample analysis using various types of detectors, evaluation of the obtained data.
Energy-dispersive spectroscopy. Qualitative and quantitative analysis of spectra.
EBIC – analysis of semiconductor structures using an electron beam. Determination of the diffusion length of minority carriers. PN junction
X-ray diffraction
computing tomography
Measurement uncertainties