Course detail

Microscopy and Analysis Using Charged Particles

CEITEC VUT-DS147AAcad. year: 2025/2026

Brief characteristics of electron and ion optical devices (microscopes, lithographs).
Foundations of charged particle optics: the motion of charged particles in homogeneous fields, explanation of the action of magnetic and electrostatic electron lens a deflector.
Trajectory equation, the determination of paraxial optical properties and aberrations.
The computation of fields needed for focusing and deflection of charged particles and determination of their optical properties. The design of electron lenses with modern CAD methods.
The sources of electrons and ions, their properties and consequences for the design of microscopes.
Beam focusing in a scanning electron microscope, the dependence of current in the probe on the probe size, detectors and analytical methods.
Specific problems of generation and processing images in a transmission electron microscope, the resolution of an image.
Analytical methods used in scanning and transmission microscopy, energy and mass spectrometers. 

Language of instruction

Czech, English

Mode of study

Not applicable.

Guarantor

doc. Ing. Jakub Zlámal, Ph.D.

Department

Central European Institute of Technology BUT (CEITEC VUT)

Entry knowledge

Mathematics, light optics, theory of electromagnetic fields and Fourier methods on the level of MSc courses of physics or physical engineering. 

Rules for evaluation and completion of the course

Oral examination with half-an-hour written preparation with possibility of using any literature. During the examination a student shows his orientation in the branch and understanding the topic. 

Aims

The knowledge of theoretical basis of particle optics and instrumentation for electron microscopy (imaging, analysis of samples) and technological applications of charged particle beams. 

Study aids

Not applicable.

Prerequisites and corequisites

Not applicable.

Basic literature

D. B. Williams, C. B. Carter, Transmission Electron Microscopy (2nd ed.), Springer, 2009 (EN) (EN)
Eckertová, L. a Frank, L., ed., Metody analýzy povrchů. Elektronová mikroskopie a difrakce. Praha: Academia 1996 (CS)
Frank, L. a Král, J., ed.: Metody analýzy povrchů. Iontové, sondové a speciální metody. Praha: Academia 2002. (CS)
L. Reimer, Scanning Electron Microscopy (2nd ed.), Springer,1998 (EN) (EN)
P. W. Hawkes and E. Kasper, Principles of Electron Optics, Vol. I a II. London: Academic Press 1989 a 1996. (EN) (EN)
S. Humphries, Jr: Charged Particle Beams. New York: J. Wiley, 1990. (EN) (EN)

Recommended reading

Not applicable.