Course detail

Microsensors and Microelectromechanical Systems

FEKT-BKC-MMSAcad. year: 2024/2025

Introduction into microsensors, general calsification and parameters, and microelectromechanical systems (MEMS). Fundamentals of microelectronic technologies and MEMS technology. Fundamentals of phenomenas in materials including semiconductors and their exploiting in sensors. Resistive, capacitive and inductance microsensors including MEMS solution (position, pressure, temperature, acceleration, ....). Magnetoelectric sensors and Hall's probes. Generating sensors based on thermoelectric, piezoelectric, and inductive principle. Optical and CCD sensors. Light emission sensor generators. Chemical and biochemical sensors (conductometric, pH sensors, lambda probe, enzymatic sensors, ...). New trends in microsensors and MEMS.

Language of instruction

Czech

Number of ECTS credits

5

Mode of study

Not applicable.

Guarantor

prof. Ing. Jaromír Hubálek, Ph.D.

Department

Department of Microelectronics (UMEL)

Entry knowledge

The subject knowledge on the secondary school level is required.

Rules for evaluation and completion of the course

Requirements for completion of a course are specified by a regulation issued by the lecturer responsible for the course and updated for every.
The content and forms of instruction in the evaluated course are specified by a regulation issued by the lecturer responsible for the course and updated for every academic year.

Aims

Target of the course is to present theory, principles and design of microsensors and microelectromechanical systems (MEMS), to train how to design microsystems and their application.
Fundamental knowledge of theory and earning practical skills how to design microelectromechanical systems, microsensors and to apply methods of non-electrical quantities measurement, methodology and evaluation.

Study aids

Not applicable.

Prerequisites and corequisites

Not applicable.

Basic literature

HUBÁLEK, J.; DRBOHLAVOVÁ, J.; PRÁŠEK, J.; BUŠINOVÁ, P.; BENDOVÁ, M. Mikrosenzory a mikroelektromechanické systémy. Brno: 2012. (CS)
HUBÁLEK, J.; PRÁŠEK, J.; PEKÁRKOVÁ, J; BENDOVÁ, M.; DRBOHLAVOVÁ, J.; MAJZLÍKOVÁ, P. Microsensors and Microelectromechanical Systems. Brno: 2015. (EN)

Recommended reading

Julian W. Gardner; Microsensors : Principles and Applications. John Wiley & Sons Inc., 2020, ISBN 0470850434 (EN)
Czichos Horst; Measurement, Testing and Sensor Technology: Fundamentals and Application to Materials and Technical Systems. Springer International Publishing AG, 2018, ISBN 9783319763842 (EN)

Classification of course in study plans

  • Programme BKC-MET Bachelor's, 3. year of study, summer semester, compulsory-optional

Type of course unit

 

Lecture

26 hours, optionally

Teacher / Lecturer

prof. Ing. Jaromír Hubálek, Ph.D.

Syllabus

Introduction into microsensors and micromechanical systems. General parameters, classification, characteristics.
Fundaments of microelectronic technologies. Classification of microelectronic technologies, technologies of thin and thick films, fundaments of semiconductor technologies.
Introduction into semiconductors and their exploiting in sensorics.
Resistive sensors. General properties, model of electric schematic diagram, classification of resistive sensors, essential description of microsensors (gauges, thermistors, posistors, ...).
Capacitive microsensors. General parameters, model of electric schematic diagram, classification of capacitive sensors.
Hall sensors. Physical principle, materials for Hall sensors.
Piezoelectric sensors. Physical principle, materials for piezoelectric sensors, design and application.
CCD sensors. Physical principle, General parameters and application.
Light emission sensor generators.
Chemical sensors. Physical principle. General parameters and application. Classification of chemical sensors, description (conductometric, pH sensors, ...).
Special types of sensors.
Micromechanical systems. General parameters and application. Manufacturing of micromechanical systems.
New trends in microsensorics and micromechanical systems.

Laboratory exercise

26 hours, compulsory

Teacher / Lecturer

prof. Ing. Jaromír Hubálek, Ph.D.

Syllabus

Introduction, administration and organisation, safety at work
Practical fundamental of microelectronic technology, Laboratory project
Measurement of position
Measurement of temperatures (resistance)
Measurement of temperatures (thermoelectric)
Measurement of pressure
Measurement of flow
Measurement of velocity and rotation speed
Measurement of light
Measurement with chemical sensors
Special sensors
Consultations by lab project
Free topic