Course detail
Diagnostics and Testing
FEKT-MPA-DMEAcad. year: 2022/2023
Diagnostic methods for determining properties and parameters of electrical insulating materials and systems. Microscopic, spectroscopic and diffractometric diagnostic methods, physical principles and applications. Diagnostic methods for determining the properties of semiconductor wafers and structures, contamination and defects in semiconductor materials. Processing and evaluation of measured data. Translated with www.DeepL.com/Translator (free version)
Language of instruction
Number of ECTS credits
Mode of study
Guarantor
Learning outcomes of the course unit
- describe theoretical basis of electrical and physical diagnostics methods used for determination of properties, parameters and composition of electrical materials,
- explain general base of processing and evaluating of measured data,
- describe organization of testing and certification in Czech Republic and in European Union,
- define legislative requirements in the field of metrology,
- be knowledgeable in diagnostics methods, plan usage of suitable method for concrete application, including of simple interpretation of obtained information.
Prerequisites
Co-requisites
Planned learning activities and teaching methods
Assesment methods and criteria linked to learning outcomes
up to 60 points from written final exam
Final exam is focused on verification of knowledge and orientation in the field of diagnostics methods and organization of testing.
Course curriculum
1. Overview of optical microscopy methods. Lens geometry and defects. Lens and eyepiece. Characteristic values of an optical microscope. Microscopic observations.
2. Scanning and transmission electron microscopy. Methods of environmental scanning electron microscopy. Sources of electrons, physical properties of electrons, electron optics, defects in electromagnetic lenses, characteristic values of the scanning electron microscope.
3. Diagnostic methods based on the interaction of electrons with solid matter. Elastic inelastic scattering. Emission of back-reflected and secondary electrons, their detection and use in scanning electron microscopy. EBIC method.
4. Spectroscopic methods and their overview. Principle of excitation spectra. Origin of characteristic and continuous X-rays. X-ray spectral microanalysis. EDS and WDS methods.
5. Methods of raster tip microscopy. Raster tunneling microscopy and atomic force microscopy. Physical principles. Applications in the diagnosis of physical properties of materials.
6. Diffraction, diffraction and diffractometric methods. X-ray diffraction methods, electron and neutron diffraction.
7. Powder X-ray diffraction spectroscopy, theoretical assumptions, application radius, instrumentation, interpretation of diffraction spectra, sample preparation.
8. Diagnostic methods related to the determination of the influence of operating and transport conditions on the properties of materials.
9. Overview of diagnostic methods related to the safety of electrical objects.
10. Statistical analysis of univariate data. Sampling characteristics. Point and interval estimation of normal and exponential distribution parameters.
11. Diagnostics, reliability and testing. Organisation of testing and certification in the Czech Republic. Basic concepts of technical diagnostics, overview of diagnostic methods. Translated with www.DeepL.com/Translator (free version)
Work placements
Aims
Specification of controlled education, way of implementation and compensation for absences
Recommended optional programme components
Prerequisites and corequisites
Basic literature
Ifan Hughes, Thomas Hase; Measurements and their Uncertainties: A practical guide to modern error analysis; Oxford University Press; 2010 (EN)
OĆonnor, D.J. and others: Surface Analysis Methods in Materials Science. Springer Berlin 2003. ISBN0931-5195 (EN)
Reimer,L.:Scanning electron microscopy,Springer Verlag Berlin,2005 (EN)
Van Zant, P.: Microchip fabrication. Fourth edition. McGraw-Hill Publication. New York, 2000. (EN)
Recommended reading
Classification of course in study plans