Course detail
Epitaxial Materials for Electronics and Photonics
CEITEC VUT-DS117Acad. year: 2020/2021
This lecture will build up competence regarding semiconductor-based electronic, optoelectronic and photonic devices. We will address physical and technological aspects of semiconductor materials and the epitaxial growth of heterostructures and nanostructures. Finally, we will discuss device applications like high-electron mobility transistors, diode lasers, vertical-cavity surface-emitting lasers and quantum cascade lasers for the mid-infrared and terahertz region.
Language of instruction
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Learning outcomes of the course unit
Prerequisites
Co-requisites
Planned learning activities and teaching methods
Assesment methods and criteria linked to learning outcomes
Course curriculum
• Relevant Materials (doping, alloying, lattice-matching, strain-engineering)
• Epitaxial Growth Processes (growth kinetics, limitations)
• Molecular Beam Epitaxy and Ultra-High Vacuum Technology (requirements, system components, case studies)
• Metal-Organic Chemical Vapor Deposition (requirements, components, case studies)
• In-situ and ex-situ diagnostics (RHEED, residual gas analysis, microscopy, X-ray diffraction)
• Epitaxial Growth of Self-Assembled Nanostructures (quantum dots, nanowires, positioning, heterostructure growth)
• Device Applications of Semiconductor Heterostructures (HEMTs, diode lasers, VCSELs, QCLs)
Work placements
Aims
Specification of controlled education, way of implementation and compensation for absences
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Prerequisites and corequisites
Basic literature
Recommended reading