Course detail
Diagnostics and Testing
FEKT-MPA-DMEAcad. year: 2020/2021
Organization of testing in Czech Rep. and EU. Diagnostic methods for evaluation of properties and parameters of electroinsulating materials and systems. Diagnostic methods for evaluation of properties of semiconductor wafers and structures, of contamination and defects in semiconductor materials. Diagnostic methods based on exploitation of electron beam for evaluation of structure and composition of materials. Theory of evaluation of measured data.
Language of instruction
Number of ECTS credits
Mode of study
Guarantor
Learning outcomes of the course unit
- describe theoretical basis of electrical and physical diagnostics methods used for determination of properties, parameters and composition of electrical materials,
- explain general base of processing and evaluating of measured data,
- describe organization of testing and certification in Czech Republic and in European Union,
- define legislative requirements in the field of metrology,
- be knowledgeable in diagnostics methods, plan usage of suitable method for concrete application, including of simple interpretation of obtained information.
Prerequisites
Co-requisites
Planned learning activities and teaching methods
Assesment methods and criteria linked to learning outcomes
up to 60 points from written final exam
Final exam is focused on verification of knowledge and orientation in the field of diagnostics methods and organization of testing.
Course curriculum
2. Scanning and transmission electron microscopy. Methods of environmental scanning electron microscopy. Electron sources, electron optics, 3. resolution, depth of field.
3. Diagnostic methods based on electron-solid interaction. Elastic inelastic scattering. Emission of backscattered and secondary electrons, their detection and use in scanning electron microscopy. EBIC method.
4. Spectroscopic methods and their overview. Principle of excitation spectra. Origin of characteristic and continuous X-rays. X-ray spectral microanalysis. EDS and WDS methods.
5. Methods of raster tip microscopy. Raster tunneling microscopy and atomic force microscopy. Physical principles. Potential applications in the diagnosis of the viscous properties of materials.
6. Diffraction, diffraction and diffractometric methods. X-ray diffraction methods, electron and neutron diffraction.
7. Powder X-ray diffraction spectroscopy, theoretical assumptions, application radius, instrumentation, interpretation of diffraction spectra, sample preparation.
8. Diagnostic methods related to the determination of the influence of operating and transport conditions on the properties of materials.
9. Overview of diagnostic methods related to the safety of electrical objects.
10. Statistical analysis of univariate data. Sampling characteristics. Point and interval estimation of normal and exponential distribution parameters.
11. Diagnostics, reliability and testing. Organisation of testing and certification in the Czech Republic. Basic concepts of technical diagnostics, overview of diagnostic methods.
Work placements
Aims
Specification of controlled education, way of implementation and compensation for absences
Recommended optional programme components
Prerequisites and corequisites
Basic literature
OĆonnor, D.J. and others: Surface Analysis Methods in Materials Science. Springer Berlin 2003. ISBN0931-5195 (EN)
Reimer,L.:Scanning electron microscopy,Springer Verlag Berlin,2005 (EN)
Van Zant, P.: Microchip fabrication. Fourth edition. McGraw-Hill Publication. New York, 2000. (EN)
Recommended reading
Classification of course in study plans
- Programme MPA-EEN Master's 2 year of study, winter semester, compulsory-optional