Course detail
Microtechnologies
CEITEC VUT-DS107AAcad. year: 2017/2018
Not applicable.
Language of instruction
English
Mode of study
Not applicable.
Guarantor
Learning outcomes of the course unit
Not applicable.
Prerequisites
Not applicable.
Co-requisites
Not applicable.
Planned learning activities and teaching methods
Not applicable.
Assesment methods and criteria linked to learning outcomes
Not applicable.
Course curriculum
Not applicable.
Work placements
Not applicable.
Aims
Not applicable.
Specification of controlled education, way of implementation and compensation for absences
Not applicable.
Recommended optional programme components
Not applicable.
Prerequisites and corequisites
Not applicable.
Basic literature
Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1,2, Edited by P. Rai-Choudhury. Society of Photo-Optical Instrumentation Engineers, 1997
Marc J. Madou, Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set. CRC Press, 2011
Tai-Ran Hsu, MEMS & Microsystems: Design, Manufacture, and Nanoscale Engineering. Wiley, 2008
Marc J. Madou, Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set. CRC Press, 2011
Tai-Ran Hsu, MEMS & Microsystems: Design, Manufacture, and Nanoscale Engineering. Wiley, 2008
Recommended reading
Not applicable.