Course detail

Plasma nanotechnologies

CEITEC VUT-DS110AAcad. year: 2016/2017

Not applicable.

Language of instruction

Czech

Mode of study

Not applicable.

Department

Přírodovědecká fakulta (PřF MU)

Learning outcomes of the course unit

Not applicable.

Prerequisites

Not applicable.

Co-requisites

Not applicable.

Planned learning activities and teaching methods

Not applicable.

Assesment methods and criteria linked to learning outcomes

Not applicable.

Course curriculum

Not applicable.

Work placements

Not applicable.

Aims

Not applicable.

Specification of controlled education, way of implementation and compensation for absences

Not applicable.

Recommended optional programme components

Not applicable.

Prerequisites and corequisites

Not applicable.

Basic literature

Handbook of Nanotechnology, Ed. B. Bhushan, Springer 2010
Handbook of Plasma Immersion Ion Implantation and Deposition, Ed. A. Anders, Wiley 2000
Lecture Notes on Principles of Plasma Processing, F. F. Chen, J. P. Chang, Plenum 2002
Principles of Plasma Discharges and Material Processing, M. A. Lieberman, A. J. Lichtenberg, Wiley 1994

Recommended reading

Not applicable.

Classification of course in study plans

  • Programme STIAMN Doctoral

    branch PNTMT , 1 year of study, winter semester, compulsory-optional
    branch PNTMT , 2 year of study, winter semester, compulsory-optional

  • Programme STIPMNK Doctoral

    branch PNTMT , 1 year of study, winter semester, compulsory-optional
    branch PNTMT , 2 year of study, winter semester, compulsory-optional