Course detail
Plasma nanotechnologies
CEITEC VUT-DS110AAcad. year: 2016/2017
Not applicable.
Language of instruction
Mode of study
Guarantor
Department
Learning outcomes of the course unit
Prerequisites
Co-requisites
Planned learning activities and teaching methods
Assesment methods and criteria linked to learning outcomes
Course curriculum
Work placements
Aims
Specification of controlled education, way of implementation and compensation for absences
Recommended optional programme components
Prerequisites and corequisites
Basic literature
Handbook of Plasma Immersion Ion Implantation and Deposition, Ed. A. Anders, Wiley 2000
Lecture Notes on Principles of Plasma Processing, F. F. Chen, J. P. Chang, Plenum 2002
Principles of Plasma Discharges and Material Processing, M. A. Lieberman, A. J. Lichtenberg, Wiley 1994
Recommended reading
Classification of course in study plans
- Programme STIAMN Doctoral
branch PNTMT , 1 year of study, winter semester, compulsory-optional
branch PNTMT , 2 year of study, winter semester, compulsory-optional - Programme STIPMNK Doctoral
branch PNTMT , 1 year of study, winter semester, compulsory-optional
branch PNTMT , 2 year of study, winter semester, compulsory-optional