Course detail
Plasma nanotechnologies
CEITEC VUT-DS110AAcad. year: 2014/2015
Not applicable.
Language of instruction
Czech
Mode of study
Not applicable.
Guarantor
Department
Přírodovědecká fakulta (PřF MU)
Learning outcomes of the course unit
Not applicable.
Prerequisites
Not applicable.
Co-requisites
Not applicable.
Planned learning activities and teaching methods
Not applicable.
Assesment methods and criteria linked to learning outcomes
Not applicable.
Course curriculum
Not applicable.
Work placements
Not applicable.
Aims
Not applicable.
Specification of controlled education, way of implementation and compensation for absences
Not applicable.
Recommended optional programme components
Not applicable.
Prerequisites and corequisites
Not applicable.
Basic literature
Handbook of Nanotechnology, Ed. B. Bhushan, Springer 2010
Handbook of Plasma Immersion Ion Implantation and Deposition, Ed. A. Anders, Wiley 2000
Lecture Notes on Principles of Plasma Processing, F. F. Chen, J. P. Chang, Plenum 2002
Principles of Plasma Discharges and Material Processing, M. A. Lieberman, A. J. Lichtenberg, Wiley 1994
Handbook of Plasma Immersion Ion Implantation and Deposition, Ed. A. Anders, Wiley 2000
Lecture Notes on Principles of Plasma Processing, F. F. Chen, J. P. Chang, Plenum 2002
Principles of Plasma Discharges and Material Processing, M. A. Lieberman, A. J. Lichtenberg, Wiley 1994
Recommended reading
Not applicable.