Course detail

Smart and Semiconductor Sensors

FEKT-MIPSAcad. year: 2012/2013

Term definition, sensors characterisation. Semiconductor sensors technologies, bulk and surface micromachining. Basic physical effects. Mechanical, magnetic, radiation, thermal, chemical sensors. Biosensors, Smart sensors. Smart sensors conception - transducer, signal processing, diagnostic, calibration, communication standards. Examples of the typical applications in the selected systems.

Language of instruction

Czech

Number of ECTS credits

Mode of study

Not applicable.

Guarantor

doc. Ing. Petr Beneš, Ph.D.

Department

Department of Control and Instrumentation (UAMT)

Learning outcomes of the course unit

The students will get knowledge about possibilities and limits of the semiconductor and Smart sensors

Prerequisites

The subject knowledge on the Bachelor´s degree level is requested.

Co-requisites

Not applicable.

Planned learning activities and teaching methods

Teaching methods depend on the type of course unit as specified in the article 7 of BUT Rules for Studies and Examinations.

Assesment methods and criteria linked to learning outcomes

Team semester project is evaluated by 40 points.
Final examination is evaluated by 60 points at maximum.

Course curriculum

Term definition, sensors characterisation
Semiconductor sensors technologies, bulk and surface micromachining
Basic semiconductor physical effects
Mechanical sensors
Mechanical sensors
Magnetic sensors
Radiation sensors
Radiation sensors
Thermal sensors
Chemical sensors
Biosensors
Smart sensors conception - transducer, signal processing, diagnostic, calibration, communication standards
Examples of the typical applications in the selected systems

Work placements

Not applicable.

Aims

To introduce the students to basic problem areas of semiconductor sensors and their applications. Make the survey of the relevant physical effect, measuring method and conception of the modern micromechanical sensors.

Specification of controlled education, way of implementation and compensation for absences

The content and forms of instruction in the evaluated course are specified by a regulation issued by the lecturer responsible for the course and updated for every academic year.

Recommended optional programme components

Not applicable.

Prerequisites and corequisites

Not applicable.

Basic literature

Guldan, A.: Mikroelektronické senzory. Alfa, Bratislava, 1987 (SK)
Husák, M.: Mikrosenzory a mikroaktuátory. Academia, Praha, 2008 (CS)

Recommended reading

Gad-El-Hak, M.: The MEMS Handbook. CRC, New York, 2002 (EN)
SZE, S.M.: Semiconductor Sensors. John Wiley & Sons, New York, 1994 (EN)

Classification of course in study plans

  • Programme EEKR-M Master's

    branch M-KAM , 2 year of study, winter semester, elective specialised

  • Programme EEKR-M Master's

    branch M-KAM , 2 year of study, winter semester, elective specialised

  • Programme EEKR-CZV lifelong learning

    branch EE-FLE , 1 year of study, winter semester, elective specialised

Type of course unit

 

Lecture

26 hod., optionally

Teacher / Lecturer

Ing. Stanislav Klusáček, Ph.D.

Syllabus

Term definition, sensors characterisation
Semiconductor sensors technologies, bulk and surface micromachining
Basic semiconductor physical effects
Mechanical sensors
Mechanical sensors
Magnetic sensors
Radiation sensors
Radiation sensors
Thermal sensors
Chemical sensors
Biosensors
Smart sensors conception - transducer, signal processing, diagnostic, calibration, communication standards
Examples of the typical applications in the selected systems

Laboratory exercise

26 hod., compulsory

Teacher / Lecturer

Ing. Stanislav Klusáček, Ph.D.
Ing. Martin Vágner, Ph.D.
Ing. Zdeněk Havránek, Ph.D.

Syllabus

Measuring of the semiconductor sensor parameters - individual term project