Course detail
Electrovacuum instruments and cryogenic technique
FEKT-BEPTAcad. year: 2012/2013
Gas, steam, pressure. Ideal gas laws. Principles of kinetic theory of gases. Pumping processes. Special electronic circuits for electro-vacuum devices. Devices based on measuring of macroscopic properties of gas (vacuometers,
mass flowmeters), on control of charged particles trajectories (mass spectrometers, electron microscopes) and on exploitation of cryogenic technology (cryogenic and cryosorption pumps). Devices based on exploitation of gas discharges ( plasma deposition and plasma etching devices, ionic pumps).
Language of instruction
Number of ECTS credits
Mode of study
Guarantor
Department
Learning outcomes of the course unit
Prerequisites
Co-requisites
Planned learning activities and teaching methods
Assesment methods and criteria linked to learning outcomes
Finisch examine - 77 marks
(oral and written examine)
Course curriculum
Work placements
Aims
Specification of controlled education, way of implementation and compensation for absences
Recommended optional programme components
Prerequisites and corequisites
Basic literature
Fikes,L.: Fyzika nízkých tlaků, SNTL, Praha, 1991. (CS)
Grozskowski J.: Technika vysokého vakua, SNTL, Praha, 1981 (CS)
J. F. O‘Hanlon: A User‘s Guide to Vacuum Technology, John Wiley & Sons Inc., Hoboken, New Jersey (EN)
Jaroslav Boušek, Josef Šandera: Elektrovakuové přístroje a technika nízkých teplot, skriptum FEKT VUT, Brno 2003 Jaroslav Boušek, Josef Šandera: Elektrovakuové přístroje a technika nízkých teplot, skriptum FEKT VUT, Brno 2003 (CS)
Pátý,L.: Vakuová technika, ČVUT, Praha, 1990. (CS)
V.Hulínský, K.Jurek: Zkoumání látek elektronovým paprskem, SNTL, Praha 1982 (CS)
Recommended reading
Classification of course in study plans
Type of course unit
Lecture
Teacher / Lecturer
Syllabus
Pumping processes. Gas transport through vacuum pipes, gas conductance of vacuum pipes. Influence of leakage and desorption. Surface processes. Different types of gas transport - turbulent, viscose, molecular and effusion.
Basic principles of gas transport - transport and getter pumps. Mechanical pumps, Roots blowers, turbo pumps. Diffusion pumps. Getter pumps.
The basic principles of vacuum equipment design. Basic technologies in the vacuum equipment production.
Electronic circuits for electro-vacuum instruments. High voltage power sources, high frequency generators. Circuits for very low current measurement. Circuits for the potential isolation, electronic protection circuits.
Devices based on gas volume and gas particle properties. Thermocouple gauges, Pirani gauges, mass flow-meters. Ion gauges.
Devices based on trajectory control of charged particles thermal emission, ionization, electromagnetic and electrostatic deflection.
Devices based on trajectory control of charged particles mass spectrometers.
Devices based on trajectory control of charged particles electron microscopes.
Devices based on usage of cryogenic technology - cryogenic technology in electro-vacuum technology, cryogenic and cryosorption pumps.
Devices based on usage of cryogenic technology - superconductivity, exploitation of superconductivity.
Devices based on usage of gas dicharges - types of discharges, examples of their exploitation. Plasma parameters, measurement of plasma parameters.
Devices based on usage of gas dicharges - cathode sputtering, plasma deposition from gas phase, plasma etching. Titanium discharge pump, ionic pump.
Fundamentals seminar
Teacher / Lecturer
Syllabus
The thermal velocity of the gas molecules, Maxwell-Boltzmann statistic. The mean free path of gas molecules. Volume processes and transport of gas, diffusion, viscosity of gas, thermal conductivity of gas.
The gas transport through the vacuum pipes. Gas conductance of Vacuum pipes. Ohms law in gas transport. The volume and mass flow of the gas. The different mechanism of the gas transport - turbulent, viscose, molecular, effusion.
The limit pressure of the vacuum equipment. Pumping speed of the vacuum pumps and its measurement, the exhaust time. The influence of leakage and desorption.
The surface processes, adsorption, desorption, monomolecular and multimolecular layers, basic adsorption isotherms, saturated vapour pressure.
The basic principles of vacuum equipment design.
Laboratory exercise
Teacher / Lecturer
Syllabus
Measurement of pumping velocity of pumping units.
Calibration of thermocouple gauge.
Measurement of vacuum conductivity of pipes.
Measurement of gas flow, calibration of flowmeter.
Materials and production methods used in vacuum technology.
Design principles of vacuum devices.
Searching of vacuum leakages.
Vacuum evaporation.
Cathode sputtering.