Course detail
Particle Optics
FSI-TCOAcad. year: 2010/2011
The course deals with problems of optics of charged particles in focusing and deflection systems and spectrometers. The sources of electrons and ions are characterized as well as electron and ion optical elements and instruments utilizing the beams of charged particles.
Language of instruction
Czech
Number of ECTS credits
6
Mode of study
Not applicable.
Guarantor
Department
Learning outcomes of the course unit
Knowledge of motion of charged particles in electromagnetic fields of electron and ion lenses, deflectors and spectrometers as well as the knowledge of instruments using them for microscopic or technological applications.
Prerequisites
Knowledge of electromagnetism on the level defined by the textbook HALLIDAY, D. - RESNICK, R. - WALKER, J.: Fundamentals of Physics. J. Wiley and Sons. MATHEMATICS: Basics of vector analysis.
Co-requisites
Not applicable.
Planned learning activities and teaching methods
Teaching methods depend on the type of course unit as specified in the article 7 of BUT Rules for Studies and Examinations.
Assesment methods and criteria linked to learning outcomes
Active participation at tutorials and correct protocols. Exam is oral, two questions from the list of subjects given above. The preparation takes 30 minutes, lecture notes and literature are allowed.
Course curriculum
Not applicable.
Work placements
Not applicable.
Aims
The course improves the knowledge of the students about the most important instruments used in microscopy and microanalysis, in electron and ion beam technology and in the physics of surfaces and thin films.
Specification of controlled education, way of implementation and compensation for absences
Compulsory participation at tutorials, protocol with solution of all sample problems and on CAD projects. Auxiliary lecture notes will be provided to the students on Internet.
Recommended optional programme components
Not applicable.
Prerequisites and corequisites
Not applicable.
Basic literature
B. Lencová, M. Lenc: Optika iontových svazků. Metody analýzy povrchů. Iontové, sondové a speciální metody. (L. Frank, J.Král, ed.), Academia 2002, 65-103.
B. Sedlák, I. Štoll: Elektřina a magnetismus. Academia 1993.
M. Lenc, B. Lencová: Optické prvky elektronových mikroskopů. Metody analýzy povrchů. Elektronová mikroskopie a difrakce. (L. Eckertová, L. Frank ed.), Academia 1996.
B. Sedlák, I. Štoll: Elektřina a magnetismus. Academia 1993.
M. Lenc, B. Lencová: Optické prvky elektronových mikroskopů. Metody analýzy povrchů. Elektronová mikroskopie a difrakce. (L. Eckertová, L. Frank ed.), Academia 1996.
Recommended reading
B. Urgošík: Dynamické hmotové spektrometry. SNTL 1972.
S. Humphries, Jr.: Charged Particle Beams. J. Wiley 1990.
V. Hulínský a K. Jurek: Zkoumání látek elektronovým paprskem. SNTL 1982.
S. Humphries, Jr.: Charged Particle Beams. J. Wiley 1990.
V. Hulínský a K. Jurek: Zkoumání látek elektronovým paprskem. SNTL 1982.
Classification of course in study plans
Type of course unit
Lecture
26 hod., optionally
Teacher / Lecturer
Syllabus
Overview of instruments utilizing the beams of charged particles for the study of structure and composition of solids and in technological applications.
Wave and relativistic properties of charged particles. Equation of motion for charged particles in electrostatic and magnetic fields.
Qualitative description of electrostatic and magnetic lenses and deflectors, based on equation of motion.
The series expansion of potential near an optical axis. Multipole fields for particle optics and their realization.
General expression of trajectory equation for systems with straight axis.
Paraxial equation for rotationally symmetric and quadrupole lenses and for lenses with deflection systems.
Aberrations of charged particle optical systems.
Transport of particles – the use of matrix notation. The description of particle optics with variational methods (Lagrange function, index of refraction) and with Hamiltonian methods.
Basic numerical methods of computing fields in electron optics and their optical properties.
Sources of electrons and ions. Basic properties and utilization.
Scanning electron microscope – the principle of image formation, depth of field, dependence of spot current on spot size, image resolution.
Image formation in a transmission electron microscope, the image resolution.
Optics of systems with curved axis, electron and ion spectrometers – basic types and properties.
Wave and relativistic properties of charged particles. Equation of motion for charged particles in electrostatic and magnetic fields.
Qualitative description of electrostatic and magnetic lenses and deflectors, based on equation of motion.
The series expansion of potential near an optical axis. Multipole fields for particle optics and their realization.
General expression of trajectory equation for systems with straight axis.
Paraxial equation for rotationally symmetric and quadrupole lenses and for lenses with deflection systems.
Aberrations of charged particle optical systems.
Transport of particles – the use of matrix notation. The description of particle optics with variational methods (Lagrange function, index of refraction) and with Hamiltonian methods.
Basic numerical methods of computing fields in electron optics and their optical properties.
Sources of electrons and ions. Basic properties and utilization.
Scanning electron microscope – the principle of image formation, depth of field, dependence of spot current on spot size, image resolution.
Image formation in a transmission electron microscope, the image resolution.
Optics of systems with curved axis, electron and ion spectrometers – basic types and properties.
Exercise
26 hod., compulsory
Teacher / Lecturer
Syllabus
Excursion to electron beam lithography, electron beam welding and electron microscopy laboratories of the Institute of Scientific Instruments of the AS CR.
Solving sample problems: determination of velocity, mass and wavelength of electrons and protons at different energies, motion of particles in simple fields.
Computer-aided design of electron lenses – determination of fields and optical properties of typical electron and ion lenses.
Solving sample problems: determination of velocity, mass and wavelength of electrons and protons at different energies, motion of particles in simple fields.
Computer-aided design of electron lenses – determination of fields and optical properties of typical electron and ion lenses.