Detail publikačního výsledku

Magnetron sputtering of (SiC)1-x(AlN)x solid solution thin films

BILALOV, B.; KARDASHOVA, G.; GITIKCHIEV, M.; SOBOLA, D.; ABDURAZAKOV, A.

Original Title

Magnetron sputtering of (SiC)1-x(AlN)x solid solution thin films

English Title

Magnetron sputtering of (SiC)1-x(AlN)x solid solution thin films

Type

Paper in proceedings (conference paper)

Original Abstract

The theoretical estimations of thermalization zone length of the sprayed atoms and distance from a target to the conditional anode for the magnetron sputtering process are presented in this work. The calculations show that the thermalization of sprayed atoms of SiC - AlN target occurs on distance about 4 cm from a target at the pressure of Ar working gas 6 -12 Pa

English abstract

The theoretical estimations of thermalization zone length of the sprayed atoms and distance from a target to the conditional anode for the magnetron sputtering process are presented in this work. The calculations show that the thermalization of sprayed atoms of SiC - AlN target occurs on distance about 4 cm from a target at the pressure of Ar working gas 6 -12 Pa

Keywords

sputtering rate, target composition, substrate temperature, growth rate, thermalization zone

Key words in English

sputtering rate, target composition, substrate temperature, growth rate, thermalization zone

Authors

BILALOV, B.; KARDASHOVA, G.; GITIKCHIEV, M.; SOBOLA, D.; ABDURAZAKOV, A.

Released

23.03.2011

Publisher

State Dagestan University

Location

Machachkala

Book

International conference INNOVATIKA 2011

Pages from

138

Pages to

139

Pages count

2

Full text in the Digital Library

http://hdl.handle.net/

BibTex

@inproceedings{BUT76540,
  author="Bilal {Bilalov} and Gulnara {Kardashova} and Magomed {Gitikchiev} and Dinara {Sobola} and Abdula {Abdurazakov}",
  title="Magnetron sputtering of (SiC)1-x(AlN)x solid solution thin films",
  booktitle="International conference INNOVATIKA 2011",
  year="2011",
  number="23.03.2011",
  pages="138--139",
  publisher="State Dagestan University",
  address="Machachkala"
}