Publication detail

A novel hybrid integrated system for capacitive pressure MEMS sensors

HÁZE, J. VRBA, R. PAVLÍK, M.

Original Title

A novel hybrid integrated system for capacitive pressure MEMS sensors

Type

journal article - other

Language

English

Original Abstract

The paper deals with a novel hybrid integrated system for capacitive pressure MEMS sensors. This system should be splitted into the two parts. One is novel integrated capacity-to-current converter (C/I) and the second is auxiliary part made from standard SMD devices. The C/I converter was designed in CMOS process with technology AMIS 0,7 um. The second part consists of the sigma-delta converter, microcontroller, communication and data bus. The designed system profits from the previous works, where the capacity-to-digital output converter AD 7745 is the main part of the processing stage. This converter is substituted by the novel C/I converter. The C/I converter with digital calibration handled in microcontroller provide almost the same accuracy and linearity as the mentioned AD 7745 converter, but with less complexity of the whole circuitries.

Keywords

MEMS sensor, data acquisition system

Authors

HÁZE, J.; VRBA, R.; PAVLÍK, M.

RIV year

2009

Released

3. 12. 2009

Publisher

ZCU Plzen

Location

Plzen

ISBN

1802-4564

Periodical

ElectroScope - http://www.electroscope.zcu.cz

Year of study

2009

Number

3

State

Czech Republic

Pages from

41

Pages to

44

Pages count

4

URL

https://dspace5.zcu.cz/bitstream/11025/548/1/haze.pdf

BibTex

@article{BUT48726,
  author="Jiří {Háze} and Radimír {Vrba} and Michal {Pavlík}",
  title="A novel hybrid integrated system for capacitive pressure MEMS sensors",
  journal="ElectroScope - http://www.electroscope.zcu.cz",
  year="2009",
  volume="2009",
  number="3",
  pages="41--44",
  issn="1802-4564",
  url="https://dspace5.zcu.cz/bitstream/11025/548/1/haze.pdf"
}