Publication detail

In situ analysis of PMPSi thin films by spectroscopic ellipsometry

BRANDEJSOVÁ, E. ČECHAL, J. BONAVENTUROVÁ, O. NEBOJSA, A. TICHOPÁDEK, P. URBÁNEK, M. NAVRÁTIL, K. ŠIKOLA, T. HUMLÍČEK, J.

Original Title

In situ analysis of PMPSi thin films by spectroscopic ellipsometry

Type

journal article - other

Language

English

Original Abstract

Paper deals with an in situ analysis of PMPSi thin films by spectroscopic ellipsometry

Key words in English

Ellipsometry, PMPSi, optical degradation

Authors

BRANDEJSOVÁ, E.; ČECHAL, J.; BONAVENTUROVÁ, O.; NEBOJSA, A.; TICHOPÁDEK, P.; URBÁNEK, M.; NAVRÁTIL, K.; ŠIKOLA, T.; HUMLÍČEK, J.

RIV year

2004

Released

1. 1. 2004

ISBN

0447-6441

Periodical

Jemná mechanika a optika

Year of study

9

Number

9

State

Czech Republic

Pages from

260

Pages to

262

Pages count

3

BibTex

@article{BUT42364,
  author="Eva {Kolíbalová} and Jan {Čechal} and Olga {Bonaventurová} and Alois {Nebojsa} and Petr {Tichopádek} and Michal {Urbánek} and Karel {Navrátil} and Tomáš {Šikola} and Josef {Humlíček}",
  title="In situ analysis of PMPSi thin films by spectroscopic ellipsometry",
  journal="Jemná mechanika a optika",
  year="2004",
  volume="9",
  number="9",
  pages="3",
  issn="0447-6441"
}