Publication result detail

In situ analysis of PMPSi thin films by spectroscopic ellipsometry

BRANDEJSOVÁ, E.; ČECHAL, J.; BONAVENTUROVÁ, O.; NEBOJSA, A.; TICHOPÁDEK, P.; URBÁNEK, M.; NAVRÁTIL, K.; ŠIKOLA, T.; HUMLÍČEK, J.

Original Title

In situ analysis of PMPSi thin films by spectroscopic ellipsometry

English Title

In situ analysis of PMPSi thin films by spectroscopic ellipsometry

Type

Peer-reviewed article not indexed in WoS or Scopus

Original Abstract

Paper deals with an in situ analysis of PMPSi thin films by spectroscopic ellipsometry

English abstract

Paper deals with an in situ analysis of PMPSi thin films by spectroscopic ellipsometry

Key words in English

Ellipsometry, PMPSi, optical degradation

Authors

BRANDEJSOVÁ, E.; ČECHAL, J.; BONAVENTUROVÁ, O.; NEBOJSA, A.; TICHOPÁDEK, P.; URBÁNEK, M.; NAVRÁTIL, K.; ŠIKOLA, T.; HUMLÍČEK, J.

RIV year

2011

Released

01.01.2004

ISBN

0447-6441

Periodical

Jemná mechanika a optika

Volume

9

Number

9

State

Czech Republic

Pages from

260

Pages count

3

BibTex

@article{BUT42364,
  author="Eva {Kolíbalová} and Jan {Čechal} and Olga {Bonaventurová} and Alois {Nebojsa} and Petr {Tichopádek} and Michal {Urbánek} and Karel {Navrátil} and Tomáš {Šikola} and Josef {Humlíček}",
  title="In situ analysis of PMPSi thin films by spectroscopic ellipsometry",
  journal="Jemná mechanika a optika",
  year="2004",
  volume="9",
  number="9",
  pages="3",
  issn="0447-6441"
}