Publication detail

Fluctuations of focused electron beam in a conventional SEM

KNÁPEK, A. ŠIKULA, J. BARTLOVÁ, M.

Original Title

Fluctuations of focused electron beam in a conventional SEM

Type

journal article in Web of Science

Language

English

Original Abstract

Noise diagnostics was performed on a tungsten hairpin cathode that was used in conventional scanning electron microscope (SEM) which operates in a high vacuum. The focused beam was firstly measured and its power spectrum obtained in order to characterize its slope in the lower frequencies which are connected with the events occurring on the cathode surface during the emission of electrons. Further experiments involved additional noise measurements which evaluated electron beam with altering beam energy, in particular at 5 kV, 10 kV and 20 kV up to 30 kV; with and without electron beam scanning involved and with different levels of cathode heating. Obtained results were evaluated in relation to a 1/f type noise component, generation-recombination process on the cathode surface, on the shot noise and on the velocity fluctuations caused by the ion oscillations. Achieved results were discussed.

Keywords

Thermal electron emission, electronic noise, low-energy electron beam

Authors

KNÁPEK, A.; ŠIKULA, J.; BARTLOVÁ, M.

Released

20. 5. 2019

Publisher

ELSEVIER SCIENCE BV

Location

AMSTERDAM, NETHERLANDS

ISBN

0304-3991

Periodical

Ultramicroscopy

Year of study

204

Number

1

State

Kingdom of the Netherlands

Pages from

49

Pages to

54

Pages count

6

URL

https://www.sciencedirect.com/science/article/abs/pii/S0304399119300683

BibTex

@article{BUT159341,
  author="Alexandr {Knápek} and Josef {Šikula} and Milada {Bartlová}",
  title="Fluctuations of focused electron beam in a conventional SEM",
  journal="Ultramicroscopy",
  year="2019",
  volume="204",
  number="1",
  pages="49--54",
  doi="10.1016/j.ultramic.2019.05.008",
  issn="0304-3991",
  url="https://www.sciencedirect.com/science/article/abs/pii/S0304399119300683"
}