Publication result detail

Flexible foils formed by a prolonged electron beam irradiation in scanning electron microscope

ČECHAL, J.; ŠIKOLA, T.

Original Title

Flexible foils formed by a prolonged electron beam irradiation in scanning electron microscope

English Title

Flexible foils formed by a prolonged electron beam irradiation in scanning electron microscope

Type

WoS Article

Original Abstract

The ubiquitous presence of hydrocarbon contamination on solid surfaces alters their inherent physical properties and complicates the surface analyses. An irradiation of sample surface with electron beam can lead to the chemical transformation of the hydrocarbon layer to carbon films, which are flexible and capable of acting as a barrier for chemical etching of an underlying material. The growth of these foils is limited by supply of hydrocarbons to the writing beam position rather than the electron dose or electron beam current. The prepared films can find their applications in fabrication of surface nanostructures without a need of an electron sensitive resist material.

English abstract

The ubiquitous presence of hydrocarbon contamination on solid surfaces alters their inherent physical properties and complicates the surface analyses. An irradiation of sample surface with electron beam can lead to the chemical transformation of the hydrocarbon layer to carbon films, which are flexible and capable of acting as a barrier for chemical etching of an underlying material. The growth of these foils is limited by supply of hydrocarbons to the writing beam position rather than the electron dose or electron beam current. The prepared films can find their applications in fabrication of surface nanostructures without a need of an electron sensitive resist material.

Keywords

Adventitious carbon; Hydrocarbon contamination; Electron beam irradiation; Vacuum; Silicon dioxide, SiO2; Surface processes

Key words in English

Adventitious carbon; Hydrocarbon contamination; Electron beam irradiation; Vacuum; Silicon dioxide, SiO2; Surface processes

Authors

ČECHAL, J.; ŠIKOLA, T.

RIV year

2018

Released

24.06.2017

ISBN

0169-4332

Periodical

APPLIED SURFACE SCIENCE

Volume

423

Number

1

State

Kingdom of the Netherlands

Pages from

538

Pages to

541

Pages count

4

BibTex

@article{BUT137792,
  author="Jan {Čechal} and Tomáš {Šikola}",
  title="Flexible foils formed by a prolonged electron beam irradiation in scanning electron microscope",
  journal="APPLIED SURFACE SCIENCE",
  year="2017",
  volume="423",
  number="1",
  pages="538--541",
  doi="10.1016/j.apsusc.2017.06.236",
  issn="0169-4332"
}