Publication result detail

AFM imaging and fractal analysis of surface roughness of AlN epilayers on sapphire substrates

DALLAEVA, D.; TALU, S.; STACH, S.; ŠKARVADA, P.; TOMÁNEK, P.; GRMELA, L.

Original Title

AFM imaging and fractal analysis of surface roughness of AlN epilayers on sapphire substrates

English Title

AFM imaging and fractal analysis of surface roughness of AlN epilayers on sapphire substrates

Type

WoS Article

Original Abstract

The paper deals with AFM imaging and characterization of 3D surface morphology of aluminum nitride (AlN) epilayers on sapphire substrates prepared by magnetron sputtering. Due to the effect of temperature changes on epilayer's surface during the fabrication, a surface morphology is studied by combination of atomic force microscopy (AFM) and fractal analysis methods. Both methods are useful tools that may assist manufacturers in developing and fabricating AlN thin films with optimal surface characteristics. Furthermore, they provide different yet complementary information to that offered by traditional surface statistical parameters. This combination is used for the first time for measurement on AlN epilayers on sapphire substrates, and provides the overall 3D morphology of the sample surfaces (by AFM imaging), and reveals fractal characteristics in the surface morphology (fractal analysis).

English abstract

The paper deals with AFM imaging and characterization of 3D surface morphology of aluminum nitride (AlN) epilayers on sapphire substrates prepared by magnetron sputtering. Due to the effect of temperature changes on epilayer's surface during the fabrication, a surface morphology is studied by combination of atomic force microscopy (AFM) and fractal analysis methods. Both methods are useful tools that may assist manufacturers in developing and fabricating AlN thin films with optimal surface characteristics. Furthermore, they provide different yet complementary information to that offered by traditional surface statistical parameters. This combination is used for the first time for measurement on AlN epilayers on sapphire substrates, and provides the overall 3D morphology of the sample surfaces (by AFM imaging), and reveals fractal characteristics in the surface morphology (fractal analysis).

Keywords

Aluminum nitride; Epitaxy; Substrate; Surface roughness; Atomic force microscopy; Fractal analysis

Key words in English

Aluminum nitride; Epitaxy; Substrate; Surface roughness; Atomic force microscopy; Fractal analysis

Authors

DALLAEVA, D.; TALU, S.; STACH, S.; ŠKARVADA, P.; TOMÁNEK, P.; GRMELA, L.

RIV year

2017

Released

01.09.2014

Publisher

Elsevier

ISBN

0169-4332

Periodical

APPLIED SURFACE SCIENCE

Volume

312

Number

312

State

Kingdom of the Netherlands

Pages from

81

Pages to

86

Pages count

6

BibTex

@article{BUT108712,
  author="Dinara {Sobola} and Stefan {Talu} and Sebastian {Stach} and Pavel {Škarvada} and Pavel {Tománek} and Lubomír {Grmela}",
  title="AFM imaging and fractal analysis of surface roughness of AlN epilayers on sapphire substrates",
  journal="APPLIED SURFACE SCIENCE",
  year="2014",
  volume="312",
  number="312",
  pages="81--86",
  doi="10.1016/j.apsusc.2014.05.086",
  issn="0169-4332"
}