Publication result detail

Determination of mechanical properties from microcompression test

TRUHLÁŘ, M.; KRUML, T.; KUBĚNA, I.; PETRÁČKOVÁ, K.; NÁHLÍK, L.

Original Title

Determination of mechanical properties from microcompression test

English Title

Determination of mechanical properties from microcompression test

Type

Paper in proceedings (conference paper)

Original Abstract

This paper describes a microcompression test of Al - 1.5 wt. % Cu thin film deposited on Si substrate. Microcompression combines the sample preparation with the use of ion focused beam (FIB) with a compression test carried out using nanoindenter. Cylindrical specimens (pillars) were prepared using FIB. The diameter of pillars was about 1.3 microns and their height was about 2 microns (equal to the film thickness). Stress-strain curves of the thin film were obtained. The results depend on crystallographic orientation of pillar. The paper is focused to an attempt to determine as precisely as possible Young modulus of the film using experimental data and finite element modelling.

English abstract

This paper describes a microcompression test of Al - 1.5 wt. % Cu thin film deposited on Si substrate. Microcompression combines the sample preparation with the use of ion focused beam (FIB) with a compression test carried out using nanoindenter. Cylindrical specimens (pillars) were prepared using FIB. The diameter of pillars was about 1.3 microns and their height was about 2 microns (equal to the film thickness). Stress-strain curves of the thin film were obtained. The results depend on crystallographic orientation of pillar. The paper is focused to an attempt to determine as precisely as possible Young modulus of the film using experimental data and finite element modelling.

Keywords

mechanical properties, thin layers, microcompression test

Key words in English

mechanical properties, thin layers, microcompression test

Authors

TRUHLÁŘ, M.; KRUML, T.; KUBĚNA, I.; PETRÁČKOVÁ, K.; NÁHLÍK, L.

RIV year

2013

Released

14.05.2012

ISBN

978-80-86246-40-6

Book

Sborník Engineering Mechanics 2012

Pages from

1435

Pages to

1440

Pages count

6

BibTex

@inproceedings{BUT97155,
  author="Michal {Truhlář} and Tomáš {Kruml} and Ivo {Kuběna} and Klára {Petráčková} and Luboš {Náhlík}",
  title="Determination of mechanical properties from microcompression test",
  booktitle="Sborník Engineering Mechanics 2012",
  year="2012",
  pages="1435--1440",
  isbn="978-80-86246-40-6"
}