Publication result detail

Estimation of mechanical properties of thin Al surface layer

PETRÁČKOVÁ, K.; KUBĚNA, I.; TRUHLÁŘ, M.; NÁHLÍK, L.; KRUML, T.

Original Title

Estimation of mechanical properties of thin Al surface layer

English Title

Estimation of mechanical properties of thin Al surface layer

Type

Paper in proceedings (conference paper)

Original Abstract

The paper describes a new method for testing of thin layers, so-called microcompression test. As an example determination of Al thin film properties deposited on Si substrate is introduced in the paper. Microcompression combines the sample preparation with the use of focused ion beam (FIB) with a compression test carried out using nanoindenter. Cylindrical specimens (pillars) were prepared in Al film using FIB. The typical diameter of pillars was about 1.3 microns and their height was about 2 microns. The results depend on crystallographic orientation of pillar. Stress-strain curves of the thin film were obtained. Experimentally measured data on pillars needs correction to obtain undistorted material properties of Al thin film. A necessary correction using finite element modeling is suggested in the paper. The paper contributes to a better characterization of very thin surface layers and determination of their mechanical properties.

English abstract

The paper describes a new method for testing of thin layers, so-called microcompression test. As an example determination of Al thin film properties deposited on Si substrate is introduced in the paper. Microcompression combines the sample preparation with the use of focused ion beam (FIB) with a compression test carried out using nanoindenter. Cylindrical specimens (pillars) were prepared in Al film using FIB. The typical diameter of pillars was about 1.3 microns and their height was about 2 microns. The results depend on crystallographic orientation of pillar. Stress-strain curves of the thin film were obtained. Experimentally measured data on pillars needs correction to obtain undistorted material properties of Al thin film. A necessary correction using finite element modeling is suggested in the paper. The paper contributes to a better characterization of very thin surface layers and determination of their mechanical properties.

Keywords

microcompression, thin film properties, focused ion beam, FEM modelling

Key words in English

microcompression, thin film properties, focused ion beam, FEM modelling

Authors

PETRÁČKOVÁ, K.; KUBĚNA, I.; TRUHLÁŘ, M.; NÁHLÍK, L.; KRUML, T.

RIV year

2013

Released

16.04.2012

ISBN

978-80-261-0097-3

Book

14th International Conference Applied Mechanics 2012

Pages from

117

Pages to

120

Pages count

4

BibTex

@inproceedings{BUT97123,
  author="Klára {Petráčková} and Ivo {Kuběna} and Michal {Truhlář} and Luboš {Náhlík} and Tomáš {Kruml}",
  title="Estimation of mechanical properties of thin Al surface layer",
  booktitle="14th International Conference Applied Mechanics 2012",
  year="2012",
  pages="117--120",
  isbn="978-80-261-0097-3"
}