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SOLOVEI, D.; HUBALEK, J.; MOZALEV, A.
Original Title
The growth and dielectric properties of porous-anodic-alumina-supported nanostructured Ta2O5/Ta films
English Title
Type
Abstract
Original Abstract
Amorphous tantalum pentoxide, grown on sintered tantalum powders or microstructured conducting substrates, has been of interest as a metal/oxide electrode with significantly increased overall surface area. Aiming at potential application to capacitors, we propose an advanced approach to fabricate Ta2O5/Ta films with highly porous nanostructured morphology and large surface-to-volume ratio via electrochemical anodizing of tantalum layers sputter-deposited over the nanoporous alumina substrates
English abstract
Keywords
anodizing, capacitor, tantalum oxide, nanostructure
Key words in English
Authors
RIV year
2013
Released
19.08.2012
Publisher
ISE
Location
Prague, Czech Republic
Book
63rd Annual Meeting of the International Society of Electrochemistry (ISE2012)
Pages from
1
Pages to
Pages count
BibTex
@misc{BUT96827, author="Dmitry {Solovei} and Jaromír {Hubálek} and Alexander {Mozalev}", title="The growth and dielectric properties of porous-anodic-alumina-supported nanostructured Ta2O5/Ta films", booktitle="63rd Annual Meeting of the International Society of Electrochemistry (ISE2012)", year="2012", pages="1--1", publisher="ISE", address="Prague, Czech Republic", note="Abstract" }