Publication result detail

Low power MEMS heating membrane

SVATOŠ, V.; MÁRIK, M.; PEKÁREK, J.; HRDÝ, R.; CHOMOUCKÁ, J.; HUBÁLEK, J.

Original Title

Low power MEMS heating membrane

English Title

Low power MEMS heating membrane

Type

Paper in proceedings (conference paper)

Original Abstract

This paper reports on design and fabrication of the low power MEMS heating membrane - micromachined hotplates. This type of device is very often used for gas-sensing applications. The aim of this work is to produce heating membrane with the power consumption below 100 mW at the operating temperature 480 C. The sample which is going to be produced will be the membrane with size of 1x1 mm, to ascertain the applicable process of the fabrication technology and the applicable design of the micro-hotplate.

English abstract

This paper reports on design and fabrication of the low power MEMS heating membrane - micromachined hotplates. This type of device is very often used for gas-sensing applications. The aim of this work is to produce heating membrane with the power consumption below 100 mW at the operating temperature 480 C. The sample which is going to be produced will be the membrane with size of 1x1 mm, to ascertain the applicable process of the fabrication technology and the applicable design of the micro-hotplate.

Keywords

MEMS (microelectromechanical system), micro-hotplate, power consumption, micromachining.

Key words in English

MEMS (microelectromechanical system), micro-hotplate, power consumption, micromachining.

Authors

SVATOŠ, V.; MÁRIK, M.; PEKÁREK, J.; HRDÝ, R.; CHOMOUCKÁ, J.; HUBÁLEK, J.

RIV year

2013

Released

28.06.2012

Publisher

Vysoké učení technické v Brně

Location

Brno

ISBN

978-80-214-4539-0

Book

EDS 12 IMAPS CS INTERNATIONAL CONFERENCE PROCEEDINGS

Pages from

257

Pages to

260

Pages count

4

BibTex

@inproceedings{BUT93610,
  author="Vojtěch {Svatoš} and Marian {Márik} and Jan {Pekárek} and Radim {Hrdý} and Jana {Pekárková} and Jaromír {Hubálek}",
  title="Low power MEMS heating membrane",
  booktitle="EDS 12 IMAPS CS INTERNATIONAL CONFERENCE PROCEEDINGS",
  year="2012",
  number="1",
  pages="257--260",
  publisher="Vysoké učení technické v Brně",
  address="Brno",
  isbn="978-80-214-4539-0"
}