Publication result detail

Design and fabrication of MEMS low power heating membrane

SVATOŠ, V.; MÁRIK, M.; PEKÁREK, J.; HRDÝ, R.; CHOMOUCKÁ, J.; HUBÁLEK, J.

Original Title

Design and fabrication of MEMS low power heating membrane

English Title

Design and fabrication of MEMS low power heating membrane

Type

Paper in proceedings (conference paper)

Original Abstract

The aim of this work is design and fabrication of micro hotplates. This type of device is often used for gas-sensing applications. The main goal is to produce the structure of the heating membrane. Two types of membranes are discussed – suspended and close type of the membrane. The sample which is going to be produced will be a membrane with the size of 1 mm2, to ensure a suitable fabrication technology and the applicable design of the micro-hotplate. The micro hotplates power consumption has to be up to 100 mW at the operating temperature 480 C.

English abstract

The aim of this work is design and fabrication of micro hotplates. This type of device is often used for gas-sensing applications. The main goal is to produce the structure of the heating membrane. Two types of membranes are discussed – suspended and close type of the membrane. The sample which is going to be produced will be a membrane with the size of 1 mm2, to ensure a suitable fabrication technology and the applicable design of the micro-hotplate. The micro hotplates power consumption has to be up to 100 mW at the operating temperature 480 C.

Keywords

microhotplate, gas sensor, membrane

Key words in English

microhotplate, gas sensor, membrane

Authors

SVATOŠ, V.; MÁRIK, M.; PEKÁREK, J.; HRDÝ, R.; CHOMOUCKÁ, J.; HUBÁLEK, J.

RIV year

2013

Released

30.05.2012

Publisher

Mendelova univerzita v Brně

Location

Brno

ISBN

978-80-7375-618-5

Book

XII. Pracovní setkání fyzikálních chemiků a elektrochemiků

Pages from

303

Pages to

304

Pages count

2

BibTex

@inproceedings{BUT92581,
  author="Vojtěch {Svatoš} and Marian {Márik} and Jan {Pekárek} and Radim {Hrdý} and Jana {Pekárková} and Jaromír {Hubálek}",
  title="Design and fabrication of MEMS low power heating membrane",
  booktitle="XII. Pracovní setkání fyzikálních chemiků a elektrochemiků",
  year="2012",
  number="1.",
  pages="303--304",
  publisher="Mendelova univerzita v Brně",
  address="Brno",
  isbn="978-80-7375-618-5"
}