Publication result detail

Mechanical properties of pulsed-plasma polymerized vinyltriethoxysilane

ČECH, V.; GORUPPA, A.; VANĚK, J.; JONES, F.

Original Title

Mechanical properties of pulsed-plasma polymerized vinyltriethoxysilane

English Title

Mechanical properties of pulsed-plasma polymerized vinyltriethoxysilane

Type

Paper in proceedings (conference paper)

Original Abstract

Plasma-polymerized thin films of vinyltriethoxysilane have been prepared by plasma-enhanced chemical vapor deposition using an RF (13.56 MHz) helical coupling pulsed-plasma system. Thin films of the thickness ranging from 80 nm to 1.5 um were subjected to nanoindentation measurements. The Youngs modulus determined from the indentation load-displacement curve has increased with the effective power used from 4 GPa to 11 GPa. Thin films have exhibited an abrupt increase of the hardness at the film surface.

English abstract

Plasma-polymerized thin films of vinyltriethoxysilane have been prepared by plasma-enhanced chemical vapor deposition using an RF (13.56 MHz) helical coupling pulsed-plasma system. Thin films of the thickness ranging from 80 nm to 1.5 um were subjected to nanoindentation measurements. The Youngs modulus determined from the indentation load-displacement curve has increased with the effective power used from 4 GPa to 11 GPa. Thin films have exhibited an abrupt increase of the hardness at the film surface.

Key words in English

VTEO, pulsed plasma, vinyltriethoxysilane, Young modulus

Authors

ČECH, V.; GORUPPA, A.; VANĚK, J.; JONES, F.

Released

01.01.2003

Publisher

Department of chemistry, University of Bari

Location

Bari

Book

16th International Symposium on Plasma Chemistry

Pages from

461

Pages count

6

Full text in the Digital Library

http://hdl.handle.net/

BibTex

@inproceedings{BUT8362,
  author="Vladimír {Čech} and Alexander {Goruppa} and Jan {Vaněk} and Frank {Jones}",
  title="Mechanical properties of pulsed-plasma polymerized vinyltriethoxysilane",
  booktitle="16th International Symposium on Plasma Chemistry",
  year="2003",
  pages="6",
  publisher="Department of chemistry, University of Bari",
  address="Bari"
}