Publication result detail

Screen-printed nano-grain tin oxide films for micro-hotplate gas sensors

IVANOV, P., LLOBET, E., VILANOVA, X., BREZMES, J., CORREIG, X., HUBÁLEK, J., MALYSZ, K., GRACIA, I., CANÉ, C.

Original Title

Screen-printed nano-grain tin oxide films for micro-hotplate gas sensors

English Title

Screen-printed nano-grain tin oxide films for micro-hotplate gas sensors

Type

Paper in proceedings (conference paper)

Original Abstract

We report on the deposition of screen-printed tin oxide films to fabricate micromachined gas sensors. While in drop-coated or screen-printed devices the deposition of the sensing layer is usually the last step of the process, here the screen-printing was made before the backside silicon etching. This procedure avoids damaging the sensor membrane during the active layer deposition, which results in a excellent yield. Results on the morphology and gas sensitivity of the sensors developed are shown and discussed.

English abstract

We report on the deposition of screen-printed tin oxide films to fabricate micromachined gas sensors. While in drop-coated or screen-printed devices the deposition of the sensing layer is usually the last step of the process, here the screen-printing was made before the backside silicon etching. This procedure avoids damaging the sensor membrane during the active layer deposition, which results in a excellent yield. Results on the morphology and gas sensitivity of the sensors developed are shown and discussed.

Keywords

gas sensors, micro-hotplate, thick-film, thin-film

Key words in English

gas sensors, micro-hotplate, thick-film, thin-film

Authors

IVANOV, P., LLOBET, E., VILANOVA, X., BREZMES, J., CORREIG, X., HUBÁLEK, J., MALYSZ, K., GRACIA, I., CANÉ, C.

Released

12.02.2003

Publisher

Instituto de Microelectrónika de Barcelona CNM-CSIC

Location

Calella de la Costa, Barcelona, Spain

ISBN

84-607-6771-X

Book

4th Conference on Electronic Devices

Pages from

145

Pages count

1

BibTex

@inproceedings{BUT8030,
  author="Peter {Ivanov} and Eduard {Llobet} and Xavier {Vilanova} and Jesús {Brezmes} and Xavier {Correig} and Jaromír {Hubálek} and Karel {Malysz} and I. {Gracia} and Carlas {Cané}",
  title="Screen-printed nano-grain tin oxide films for micro-hotplate gas sensors",
  booktitle="4th Conference on Electronic Devices",
  year="2003",
  pages="1",
  publisher="Instituto de Microelectrónika de Barcelona CNM-CSIC",
  address="Calella de la Costa, Barcelona, Spain",
  isbn="84-607-6771-X"
}