Detail publikačního výsledku

Construction of Differential Pumping Chamber with Detector Board for Adaptation of Scanning Electron Microscope for Working in Higher Pressure

NEDĚLA, V.

Original Title

Construction of Differential Pumping Chamber with Detector Board for Adaptation of Scanning Electron Microscope for Working in Higher Pressure

English Title

Construction of Differential Pumping Chamber with Detector Board for Adaptation of Scanning Electron Microscope for Working in Higher Pressure

Type

Paper in proceedings (conference paper)

Original Abstract

This paper deals with adaptation of the scanning electron microscope (SEM) to the environmental scanning electron microscope (ESEM). ESEM allows work at higher pressure in some parts of the microscope. It focuses especially to the construction and assembly of the differential pumping chamber together with the detector board of the differential pumping chamber and it comments reasons of necessity of the assembly of these parts in the environmental scanning electron microscope.

English abstract

This paper deals with adaptation of the scanning electron microscope (SEM) to the environmental scanning electron microscope (ESEM). ESEM allows work at higher pressure in some parts of the microscope. It focuses especially to the construction and assembly of the differential pumping chamber together with the detector board of the differential pumping chamber and it comments reasons of necessity of the assembly of these parts in the environmental scanning electron microscope.

Keywords

ESEM,DIFFERENTIAL PUMPING CHAMBER, ADAPTATION

Key words in English

ESEM,DIFFERENTIAL PUMPING CHAMBER, ADAPTATION

Authors

NEDĚLA, V.

Released

01.01.2003

Location

Brno

ISBN

80-214-2401-X

Book

Proceedings of the International Conference and Competition Student EEICT 2003

Pages from

199

Pages count

5

URL

VUT Brno

Full text in the Digital Library

http://hdl.handle.net/

BibTex

@inproceedings{BUT7908,
  author="Vilém {Neděla}",
  title="Construction of Differential Pumping Chamber with Detector Board for Adaptation of Scanning Electron Microscope for Working in Higher Pressure",
  booktitle="Proceedings of the International Conference and Competition Student EEICT 2003",
  year="2003",
  pages="5",
  address="Brno",
  isbn="80-214-2401-X",
  url="VUT Brno"
}