Applied result detail

UHV rotační piezo posuv

NOVÁČEK, Z.; NEUMAN, J.; ŠIKOLA, T.; KALOUSEK, R.; ZLÁMAL, J.

Original Title

English Title

UHV rotational piezo actuator

Type

Functioning sample

Abstract

Počítačem ovládaný krokový rotační posuv ve 3 osách. Nastavení rychlosti posuvu a volba velikosti úhlového kroku. Systém navržený pro UHV podmínky.

Abstract in English

Computer controlled three axes rotary actuator. Customizable speed and angle step size. System designed for UHV condition.

Keywords

Piezo actuator; 3-axes motion; UHV AFM; laser beam alignment

Key words in English

Piezo actuator; 3-axes motion; UHV AFM; laser beam alignment

Location

A2/518

Licence fee

Use of the result by another entity is possible without acquiring a license (the result is not licensed)

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