Nanowires Electroforming of Nanoporous Electrodes

Nanowires Electroforming of Nanoporous Electrodes

Abstract

The rapidly growing microelectronics industry has placed an increasing emphasis on the development of cost-effective and environmentally thin film processing technologies. These technologies include electroplating (electrodeposition) and etching of thin films by dry and wet processing. Last ten years the nanotechnologies are in a centre of scientific interest. These new techniques bring new nanostructured materials for utilization in microelectronics processes. Anodization of aluminum under specific condition enables to create ordered nanoporous structure in growing alumina. Nanopores are distributed with regular ordering in honeycomb-like cells. The nanoporous thin film can be used as template for metal nanowires electrodeposition.

The rapidly growing microelectronics industry has placed an increasing emphasis on the development of cost-effective and environmentally thin film processing technologies. These technologies include electroplating (electrodeposition) and etching of thin films by dry and wet processing. Last ten years the nanotechnologies are in a centre of scientific interest. These new techniques bring new nanostructured materials for utilization in microelectronics processes. Anodization of aluminum under specific condition enables to create ordered nanoporous structure in growing alumina. Nanopores are distributed with regular ordering in honeycomb-like cells. The nanoporous thin film can be used as template for metal nanowires electrodeposition.

nanowires, nanotubes, electroplating

HUBÁLEK, J.

02.02.2005

Tarragona, Španělsko

5a Conferencia de Dispositivos Electrónicos, Libro de Abstracts

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