Publication result detail

COMBINED DETECTOR FOR BSE, SE AND BSE+SE DETECTION IN A LOW VOLTAGE SEM

AUTRATA, R., JIRÁK, J., ROMANOVSKÝ, V., ŠPINKA, J.

Original Title

COMBINED DETECTOR FOR BSE, SE AND BSE+SE DETECTION IN A LOW VOLTAGE SEM

English Title

COMBINED DETECTOR FOR BSE, SE AND BSE+SE DETECTION IN A LOW VOLTAGE SEM

Type

Paper in proceedings (conference paper)

Original Abstract

Combined detector for low energy BSE (ranging from 0.5 to 3 kV), high energy BSE (between 3 and 30keV), as well as for detection of SE or a mixture of SE and BSE.

English abstract

Combined detector for low energy BSE (ranging from 0.5 to 3 kV), high energy BSE (between 3 and 30keV), as well as for detection of SE or a mixture of SE and BSE.

Key words in English

combined detector, BSE,SE,low voltage SEM

Authors

AUTRATA, R., JIRÁK, J., ROMANOVSKÝ, V., ŠPINKA, J.

Released

08.07.2002

Publisher

Institute of Scientific Instruments Academy of Sciences of the Czech republic, Czechoslovak Microscopy Society

Location

Czech republic, Brno

ISBN

80-238-8986-9

Book

Recent Trends in Charged Particle Optics and Surface Physics Instrumentation

Pages from

49

Pages count

2

BibTex

@inproceedings{BUT5193,
  author="Rudolf {Autrata} and Josef {Jirák} and Vladimír {Romanovský} and Jiří {Špinka}",
  title="COMBINED DETECTOR FOR BSE, SE AND BSE+SE DETECTION IN A LOW VOLTAGE SEM",
  booktitle="Recent Trends in Charged Particle Optics and Surface Physics Instrumentation",
  year="2002",
  pages="2",
  publisher="Institute of Scientific Instruments Academy of Sciences of the Czech republic, 
Czechoslovak Microscopy Society
",
  address="Czech republic, Brno",
  isbn="80-238-8986-9"
}