Publication result detail

Sputtered and screen-printed metal oxide-based integrated microsensor arrays for the quantitative analysis of gas mixtures

STANKOVA, M.; IVANOV, P.; LLOBET, E.; BREZMES, J.; VILANOVA, X.; GRACIA, I.; CANÉ, C.; HUBÁLEK, J.; MALYSZ, K.; CORREIG, X.

Original Title

Sputtered and screen-printed metal oxide-based integrated microsensor arrays for the quantitative analysis of gas mixtures

English Title

Sputtered and screen-printed metal oxide-based integrated microsensor arrays for the quantitative analysis of gas mixtures

Type

Peer-reviewed article not indexed in WoS or Scopus

Original Abstract

Either by screen-printing or sputtering, sensitive layers of tin oxide were deposited on silicon micromachined substrates (four-element integrated microarrays). The procedures allow the deposition of sensing layers before membranes have been etched, which leads to gas micro-sensors with an excellent fabrication yield. The response of the different microarrays to ethanol, acetone and ammonia vapours and their binary mixtures was studied. The influence of ambient humidity was also investigated. By using an integrated array of four integrated microsensors operated at two different temperatures and a fuzzy ARTMAP neural network, it was possible to simultaneously identify and quantify the different species (success rate was 100%). These results confirm the viability of the techniques introduced to obtain micromachined sensors suitable for battery-powered gas/vapour monitors.

English abstract

Either by screen-printing or sputtering, sensitive layers of tin oxide were deposited on silicon micromachined substrates (four-element integrated microarrays). The procedures allow the deposition of sensing layers before membranes have been etched, which leads to gas micro-sensors with an excellent fabrication yield. The response of the different microarrays to ethanol, acetone and ammonia vapours and their binary mixtures was studied. The influence of ambient humidity was also investigated. By using an integrated array of four integrated microsensors operated at two different temperatures and a fuzzy ARTMAP neural network, it was possible to simultaneously identify and quantify the different species (success rate was 100%). These results confirm the viability of the techniques introduced to obtain micromachined sensors suitable for battery-powered gas/vapour monitors.

Keywords

tin oxide; r.f. sputtering; screen-printing; integrated microarray; micro-hotplate; quantitative gas analysis

Key words in English

tin oxide; r.f. sputtering; screen-printing; integrated microarray; micro-hotplate; quantitative gas analysis

Authors

STANKOVA, M.; IVANOV, P.; LLOBET, E.; BREZMES, J.; VILANOVA, X.; GRACIA, I.; CANÉ, C.; HUBÁLEK, J.; MALYSZ, K.; CORREIG, X.

Released

29.09.2004

Publisher

ELSEVIER SCIENCE SA

Location

LAUSANNE, SWITZERLAND

ISBN

0925-4005

Periodical

SENSORS AND ACTUATORS B-CHEMICAL

Volume

103

Number

1-2

State

Swiss Confederation

Pages from

23

Pages to

30

Pages count

8

BibTex

@article{BUT48005,
  author="Mariana {Stankova} and Peter {Ivanov} and Eduard {Llobet} and Jesús {Brezmes} and Xavier {Vilanova} and I. {Gracia} and Carlas {Cané} and Jaromír {Hubálek} and Karel {Malysz} and Xavier {Correig}",
  title="Sputtered and screen-printed metal oxide-based integrated microsensor arrays for the quantitative analysis of gas mixtures",
  journal="SENSORS AND ACTUATORS B-CHEMICAL",
  year="2004",
  volume="103",
  number="1-2",
  pages="23--30"
}