Publication result detail

Multi-Channel Detection of the Angular Distribution of Backscattered Electrons in the Scanning Low Energy Electron Microscope.

MÜLLEROVÁ, I., KONVALINA I.

Original Title

Multi-Channel Detection of the Angular Distribution of Backscattered Electrons in the Scanning Low Energy Electron Microscope.

English Title

Multi-Channel Detection of the Angular Distribution of Backscattered Electrons in the Scanning Low Energy Electron Microscope.

Type

Peer-reviewed article not indexed in WoS or Scopus

Original Abstract

The final image contrast in the scanning electron microscope (SEM) is not only a product of the interaction of primary electrons with the target, but the collection efficiency of the detector with its energy and angular distributions, as well as any subsequent signal processing, also play a role. In order to arrive at high signal-to-noise ratio, as many signal species should be caught as possible, though achieving a high contrast might require the selection of only a small part of the emission spectra. Multi-channel parallel detectors are promising in this respect.

English abstract

The final image contrast in the scanning electron microscope (SEM) is not only a product of the interaction of primary electrons with the target, but the collection efficiency of the detector with its energy and angular distributions, as well as any subsequent signal processing, also play a role. In order to arrive at high signal-to-noise ratio, as many signal species should be caught as possible, though achieving a high contrast might require the selection of only a small part of the emission spectra. Multi-channel parallel detectors are promising in this respect.

Keywords

multi-channel detector, angular distribution, low energy electron microscope

Key words in English

multi-channel detector, angular distribution, low energy electron microscope

Authors

MÜLLEROVÁ, I., KONVALINA I.

Released

30.07.2006

ISBN

1431-9276

Periodical

MICROSCOPY AND MICROANALYSIS

Volume

12

Number

2

State

United States of America

Pages from

1438

Pages count

2

BibTex

@article{BUT44384,
  author="Ilona {Müllerová} and Ivo {Konvalina}",
  title="Multi-Channel Detection of the Angular Distribution of Backscattered Electrons in the Scanning Low Energy Electron Microscope.",
  journal="MICROSCOPY AND MICROANALYSIS",
  year="2006",
  volume="12",
  number="2",
  pages="2",
  issn="1431-9276"
}