Publication result detail

Usage of Segmental Ionization Detector at Environmental Conditions

AUTRATA, R., JIRÁK, J., SCHNEIDER, L.

Original Title

Usage of Segmental Ionization Detector at Environmental Conditions

English Title

Usage of Segmental Ionization Detector at Environmental Conditions

Type

Peer-reviewed article not indexed in WoS or Scopus

Original Abstract

Environmental scanning electron microscope operates with the gaseous environment in the specimen chamber. This environment causes specific conditions for the detection of signal electrons. Classical Everhart-Thornley detector cannot be exploited for the detection of secondary electrons because of the impossibility to use high enough electric field in a gaseous environment to add sufficient energy to secondary electrons for efficient scintillation. Ionization detector is therefore used for the detection of signal electrons in environmental SEM most frequently.

English abstract

Environmental scanning electron microscope operates with the gaseous environment in the specimen chamber. This environment causes specific conditions for the detection of signal electrons. Classical Everhart-Thornley detector cannot be exploited for the detection of secondary electrons because of the impossibility to use high enough electric field in a gaseous environment to add sufficient energy to secondary electrons for efficient scintillation. Ionization detector is therefore used for the detection of signal electrons in environmental SEM most frequently.

Keywords

ESEM, Ionization detector

Key words in English

ESEM, Ionization detector

Authors

AUTRATA, R., JIRÁK, J., SCHNEIDER, L.

Released

01.01.2003

Volume

9

Number

3

Pages from

142

Pages count

2

BibTex

@article{BUT41443,
  author="Rudolf {Autrata} and Josef {Jirák} and Luděk {Schneider}",
  title="Usage of Segmental Ionization Detector at Environmental Conditions",
  year="2003",
  volume="9",
  number="3",
  pages="2"
}