Publication result detail

Deposition of Diamond Films in Arc Plasma Jet at Atmospheric Pressure

GREGOR, J., JAKUBOVÁ, I., ŠENK, J., HRABOVSKÝ, M., KOLMAN, B., KONRÁD, M., KOPECKÝ, V., VORLÍČEK, V., POKORNÝ, J.

Original Title

Deposition of Diamond Films in Arc Plasma Jet at Atmospheric Pressure

English Title

Deposition of Diamond Films in Arc Plasma Jet at Atmospheric Pressure

Type

WoS Article

Original Abstract

Study of diamond growth was made in atmospheric pressure dc arc jet with high ratio of carbon to hydrogen flow rates. A plasma torch was designed for operation with mixture of argon, hydrogen, and methane. Films deposited on cooled Mo substrate were analyzed using scanning electron microscopy and Raman spectroscopy. Polycrystalline films were created with typical crystal size of several microns, the ratio of content of diamond structures to non-diamond forms of carbon was strongly dependent on ratio of flow rates of hydrogen and methane and on orientation of surface with respect to plasma flow. Effect of parameters of plasma jet as well as effect of position and orientation of substrate surface in the plasma flow on composition and growth rate of films was investigated.

English abstract

Study of diamond growth was made in atmospheric pressure dc arc jet with high ratio of carbon to hydrogen flow rates. A plasma torch was designed for operation with mixture of argon, hydrogen, and methane. Films deposited on cooled Mo substrate were analyzed using scanning electron microscopy and Raman spectroscopy. Polycrystalline films were created with typical crystal size of several microns, the ratio of content of diamond structures to non-diamond forms of carbon was strongly dependent on ratio of flow rates of hydrogen and methane and on orientation of surface with respect to plasma flow. Effect of parameters of plasma jet as well as effect of position and orientation of substrate surface in the plasma flow on composition and growth rate of films was investigated.

Keywords

plasma deposition,diamond,plasma jet

Key words in English

plasma deposition,diamond,plasma jet

Authors

GREGOR, J., JAKUBOVÁ, I., ŠENK, J., HRABOVSKÝ, M., KOLMAN, B., KONRÁD, M., KOPECKÝ, V., VORLÍČEK, V., POKORNÝ, J.

RIV year

2011

Released

01.06.2002

ISBN

0011-4626

Periodical

Czechoslovak Journal of Physics

Volume

52

Number

suppl. D

State

Czech Republic

Pages from

878

Pages count

8

BibTex

@article{BUT40867,
  author="Jan {Gregor} and Ivana {Jakubová} and Josef {Šenk} and Milan {Hrabovský} and Blahoslav {Kolman} and Miloš {Konrád} and Vladimír {Kopecký} and V. {Vorlíček} and J. {Pokorný}",
  title="Deposition of Diamond Films in Arc Plasma Jet at Atmospheric Pressure",
  journal="Czechoslovak Journal of Physics",
  year="2002",
  volume="52",
  number="suppl. D",
  pages="8",
  issn="0011-4626"
}