Publication result detail

Surface profilometry by a parallel-mode confocal microscope

CHMELÍK, R., HARNA, Z.

Original Title

Surface profilometry by a parallel-mode confocal microscope

English Title

Surface profilometry by a parallel-mode confocal microscope

Type

Peer-reviewed article not indexed in WoS or Scopus

Original Abstract

Confocal imaging by a parallel-mode confocal mi-croscope is based on the real-time incoherent-holography technique. Besides the image amplitude, the image phase is inherently reconstructed. In this paper we prove that the phase image component can be converted into the height map, and, in this way, we measure the surface profile with the precision of several nanometers. Small height differences can be measured inside one optical section of the specimen surface, while the measurement of large differences needs to connect more optical sections. The two procedures are demonstrated experimentally even for the surface with large and steep height changes. The ambiguity in the height determination from the image phase component is overcome by means of the depth discrimination property of the microscope. The axial resolution is improved using broadband illumination.

English abstract

Confocal imaging by a parallel-mode confocal mi-croscope is based on the real-time incoherent-holography technique. Besides the image amplitude, the image phase is inherently reconstructed. In this paper we prove that the phase image component can be converted into the height map, and, in this way, we measure the surface profile with the precision of several nanometers. Small height differences can be measured inside one optical section of the specimen surface, while the measurement of large differences needs to connect more optical sections. The two procedures are demonstrated experimentally even for the surface with large and steep height changes. The ambiguity in the height determination from the image phase component is overcome by means of the depth discrimination property of the microscope. The axial resolution is improved using broadband illumination.

Keywords

holography applications; profilometry; confocal microscopy.

Key words in English

holography applications; profilometry; confocal microscopy.

Authors

CHMELÍK, R., HARNA, Z.

Released

01.04.2002

ISBN

0091-3286

Periodical

OPTICAL ENGINEERING

Volume

41

Number

4

State

United States of America

Pages from

744

Pages count

2

URL

areálová knihovna FSI

BibTex

@article{BUT40858,
  author="Radim {Chmelík} and Zdeněk {Harna}",
  title="Surface profilometry by a parallel-mode confocal microscope",
  journal="OPTICAL ENGINEERING",
  year="2002",
  volume="41",
  number="4",
  pages="2",
  issn="0091-3286",
  url="areálová knihovna FSI"
}