Publication result detail

Experimental study of MEMS capacitive sensor

PEKÁREK, J.; VRBA, R.; FICEK, R.; MAGÁT, M.

Original Title

Experimental study of MEMS capacitive sensor

English Title

Experimental study of MEMS capacitive sensor

Type

Paper in proceedings (conference paper)

Original Abstract

This paper describes a new approach to pressure sensors development using capacitive principle. Novel pressure sensor has been achieved utilizing carbon nanotubes (CNTs) arrays as the surface increase element in capacitive sensor.

English abstract

This paper describes a new approach to pressure sensors development using capacitive principle. Novel pressure sensor has been achieved utilizing carbon nanotubes (CNTs) arrays as the surface increase element in capacitive sensor.

Keywords

Pressure sensor, capacity, carbon nanotubes, plasma enhanced chemical vapor deposition

Key words in English

Pressure sensor, capacity, carbon nanotubes, plasma enhanced chemical vapor deposition

Authors

PEKÁREK, J.; VRBA, R.; FICEK, R.; MAGÁT, M.

RIV year

2010

Released

02.09.2009

Publisher

Vysoké učení technické v Brně, Antonínská 548/1

Location

Brno

ISBN

978-80-214-3933-7

Book

EDS'09 IMAPS CS International Conference Proceedings

Pages from

205

Pages to

209

Pages count

5

BibTex

@inproceedings{BUT31908,
  author="Jan {Pekárek} and Radimír {Vrba} and Richard {Ficek} and Martin {Magát}",
  title="Experimental study of MEMS capacitive sensor",
  booktitle="EDS'09 IMAPS CS International Conference Proceedings",
  year="2009",
  number="1",
  pages="205--209",
  publisher="Vysoké učení technické v Brně, Antonínská 548/1",
  address="Brno",
  isbn="978-80-214-3933-7"
}