Publication result detail

Humidity Determination in Environmental SEM

ŠPINKA, J.

Original Title

Humidity Determination in Environmental SEM

English Title

Humidity Determination in Environmental SEM

Type

Paper in proceedings (conference paper)

Original Abstract

Possibilities of humidity adjustment and measurement in the specimen chamber of the environmental scanning electron microscope (ESEM) at low pressure are described. Optimal pumpdown sequence and filling-in of water vapors to the specimen chamber problems are solved simultaneously.

English abstract

Possibilities of humidity adjustment and measurement in the specimen chamber of the environmental scanning electron microscope (ESEM) at low pressure are described. Optimal pumpdown sequence and filling-in of water vapors to the specimen chamber problems are solved simultaneously.

Keywords

ESEM, humidity measurement, pumpdown sequence

Key words in English

ESEM, humidity measurement, pumpdown sequence

Authors

ŠPINKA, J.

RIV year

2011

Released

17.01.2007

Publisher

Czechoslovak Microscopy Society

Location

České Budějovice

ISBN

978-80-239-9397-4

Book

Procedings 8th Multinational Congress on Microscopy , June 17-21,2007, Praque

Pages from

107

Pages to

108

Pages count

2

BibTex

@inproceedings{BUT28446,
  author="Jiří {Špinka}",
  title="Humidity Determination in Environmental SEM",
  booktitle="Procedings 8th Multinational Congress on Microscopy , June 17-21,2007, Praque",
  year="2007",
  pages="107--108",
  publisher="Czechoslovak Microscopy Society",
  address="České Budějovice",
  isbn="978-80-239-9397-4"
}