Detail publikačního výsledku

AFM and nanoindentation analysis of plasma polymer films prepared from tetravinylsilane monomer

TRIVEDI, R.; ŠKODA, D.; ČECH, V.

Original Title

AFM and nanoindentation analysis of plasma polymer films prepared from tetravinylsilane monomer

English Title

AFM and nanoindentation analysis of plasma polymer films prepared from tetravinylsilane monomer

Type

Paper in proceedings (conference paper)

Original Abstract

The study of surface morphology and mechanical properties of plasma polymer films was carried out. The film was prepared from tetravinylsilane monomer by plasma-enhanced chemical vapor deposition (PECVD) employing an RF helical coupling system. The RF power and deposition time were varied for the deposited films of around 1 micron thickness, which was measured by spectroscopic ellipsometry.

English abstract

The study of surface morphology and mechanical properties of plasma polymer films was carried out. The film was prepared from tetravinylsilane monomer by plasma-enhanced chemical vapor deposition (PECVD) employing an RF helical coupling system. The RF power and deposition time were varied for the deposited films of around 1 micron thickness, which was measured by spectroscopic ellipsometry.

Keywords

plasma polymerization, surface morphology, AFM, nanoindentation

Key words in English

plasma polymerization, surface morphology, AFM, nanoindentation

Authors

TRIVEDI, R.; ŠKODA, D.; ČECH, V.

Released

13.12.2007

Book

New Perspectives of Plasma Science and Technology (CD medium)

Pages from

1

Pages to

2

Pages count

2

Full text in the Digital Library

http://hdl.handle.net/

BibTex

@inproceedings{BUT28347,
  author="Rutul Rajendra {Trivedi} and David {Škoda} and Vladimír {Čech}",
  title="AFM and nanoindentation analysis of plasma polymer films prepared from tetravinylsilane monomer",
  booktitle="New Perspectives of Plasma Science and Technology (CD medium)",
  year="2007",
  pages="1--2"
}