Publication result detail

Physical versus chemical properties of plasma-polymerized a-SiOC:H films

ČECH, V.; STUDÝNKA, J.; ČECHALOVÁ, B.; JONES, F.; PEŘINA, V.; ZEMEK, J.

Original Title

Physical versus chemical properties of plasma-polymerized a-SiOC:H films

English Title

Physical versus chemical properties of plasma-polymerized a-SiOC:H films

Type

Paper in proceedings (conference paper)

Original Abstract

Plasma-polymerized a-SiOC:H films were deposited from a mixture of tetravinylsilane vapor and oxygen gas at different power (0.1-10 W) and oxygen-to-total flow rate ratio (0-0.79). The Young's modulus, hardness, refractive index, extinction coefficient, and band gap of the plasma polymer were found to be controlled by the ratio between the content of carbon and oxygen atoms in films.

English abstract

Plasma-polymerized a-SiOC:H films were deposited from a mixture of tetravinylsilane vapor and oxygen gas at different power (0.1-10 W) and oxygen-to-total flow rate ratio (0-0.79). The Young's modulus, hardness, refractive index, extinction coefficient, and band gap of the plasma polymer were found to be controlled by the ratio between the content of carbon and oxygen atoms in films.

Keywords

thin film, mechanical properties, optical properties, chemical properties

Key words in English

thin film, mechanical properties, optical properties, chemical properties

Authors

ČECH, V.; STUDÝNKA, J.; ČECHALOVÁ, B.; JONES, F.; PEŘINA, V.; ZEMEK, J.

Released

13.12.2007

ISBN

978-4-9903773-2-8

Book

18th International Symposium on Plasma Chemistry

Pages from

1

Pages to

4

Pages count

4

Full text in the Digital Library

http://hdl.handle.net/

BibTex

@inproceedings{BUT28336,
  author="Vladimír {Čech} and Jan {Studýnka} and Božena {Čechalová} and Frank {Jones} and Vratislav {Peřina} and Josef {Zemek}",
  title="Physical versus chemical properties of plasma-polymerized a-SiOC:H films",
  booktitle="18th International Symposium on Plasma Chemistry",
  year="2007",
  pages="1--4",
  isbn="978-4-9903773-2-8"
}