Publication result detail

Nanoindentation measurements of plasma polymer films

ČECH, V.; STUDÝNKA, J.; JONES, F.

Original Title

Nanoindentation measurements of plasma polymer films

English Title

Nanoindentation measurements of plasma polymer films

Type

Paper in proceedings (conference paper)

Original Abstract

Mechanical properties of thin films deposited from a mixture of tetravinylsilane vapor and oxygen gas by plasma-enhanced chemical vapor deposition were investigated using nanoindentaion. The Young's modulus and hardness of the film increased with enhanced RF power while a significant rise of oxygen concentration in the film resulted in descent of mechanical constants.

English abstract

Mechanical properties of thin films deposited from a mixture of tetravinylsilane vapor and oxygen gas by plasma-enhanced chemical vapor deposition were investigated using nanoindentaion. The Young's modulus and hardness of the film increased with enhanced RF power while a significant rise of oxygen concentration in the film resulted in descent of mechanical constants.

Keywords

nanoindentation, plasma polymerization, thin film

Key words in English

nanoindentation, plasma polymerization, thin film

Authors

ČECH, V.; STUDÝNKA, J.; JONES, F.

Released

13.12.2007

ISBN

978-4-9903773-2-8

Book

18th International Symposium on Plasma Chemistry

Pages from

1

Pages to

4

Pages count

4

Full text in the Digital Library

http://hdl.handle.net/

BibTex

@inproceedings{BUT28335,
  author="Vladimír {Čech} and Jan {Studýnka} and Frank {Jones}",
  title="Nanoindentation measurements of plasma polymer films",
  booktitle="18th International Symposium on Plasma Chemistry",
  year="2007",
  pages="1--4",
  isbn="978-4-9903773-2-8"
}