Detail publikačního výsledku

Reactive magnetron sputtering nitride layer for passivation of crystalline silicon solar cells

Hégr Ondřej, Boušek Jaroslav, Sobota Jaroslav, Bařinka Radim, Poruba Aleš

Original Title

Reactive magnetron sputtering nitride layer for passivation of crystalline silicon solar cells

English Title

Reactive magnetron sputtering nitride layer for passivation of crystalline silicon solar cells

Type

Paper in proceedings (conference paper)

Original Abstract

Reactive magnetron sputter deposition brings high deposition rate with a possibility to control the layer thickness with comparatively high precision. We deposited the currently used material in the photovoltaic industry - silicon nitride passivation layer. The aim of work was evaluation of both front side and back side surface recombinations and optical properties of sputtered layers and they comparison with passivation layers on standard solar cells made by Solartec company (Czech republic).

English abstract

Reactive magnetron sputter deposition brings high deposition rate with a possibility to control the layer thickness with comparatively high precision. We deposited the currently used material in the photovoltaic industry - silicon nitride passivation layer. The aim of work was evaluation of both front side and back side surface recombinations and optical properties of sputtered layers and they comparison with passivation layers on standard solar cells made by Solartec company (Czech republic).

Keywords

solar cell, passivation layer, magnetron sputtering, silicon nitride

Key words in English

solar cell, passivation layer, magnetron sputtering, silicon nitride

Authors

Hégr Ondřej, Boušek Jaroslav, Sobota Jaroslav, Bařinka Radim, Poruba Aleš

Released

08.09.2006

Publisher

WIP-Renewable Energies

ISBN

3-936338-20-5

Book

21st European Photovoltaic Solar Energy Conference

Volume

2006

Number

9

Pages from

822

Pages count

4

Full text in the Digital Library

http://hdl.handle.net/

BibTex

@inproceedings{BUT24574,
  author="Ondřej {Hégr} and Jaroslav {Boušek} and Jaroslav {Sobota} and Radim {Bařinka} and Aleš {Poruba}",
  title="Reactive magnetron sputtering nitride layer for passivation of crystalline silicon solar cells",
  booktitle="21st European Photovoltaic Solar Energy Conference",
  year="2006",
  volume="2006",
  number="9",
  pages="4",
  publisher="WIP-Renewable Energies",
  isbn="3-936338-20-5"
}