Publication result detail

Advanced tunable protective structure against electrostatic discharge

Petr Běťák, Kamil Nováček

Original Title

Advanced tunable protective structure against electrostatic discharge

English Title

Advanced tunable protective structure against electrostatic discharge

Type

Paper in proceedings (conference paper)

Original Abstract

New advanced SCR (silicon controlled rectifier) structures provide ESD characteristics adjustibility to be optimal for certain application. Optimal adjustment of silicon active areas dimensions is necessary to simulate by TCAD systems. Then can be uniquely determined which features will be given by certain dimensions setting.For applications with different requirements might be various geometrical masks of one structure produced and by this way to meet with defined requirements only using different type of mask.

English abstract

New advanced SCR (silicon controlled rectifier) structures provide ESD characteristics adjustibility to be optimal for certain application. Optimal adjustment of silicon active areas dimensions is necessary to simulate by TCAD systems. Then can be uniquely determined which features will be given by certain dimensions setting.For applications with different requirements might be various geometrical masks of one structure produced and by this way to meet with defined requirements only using different type of mask.

Keywords

ESD, SCR, electrostatic discharge, silicon controlled rectifier

Key words in English

ESD, SCR, electrostatic discharge, silicon controlled rectifier

Authors

Petr Běťák, Kamil Nováček

Released

01.01.2007

Book

ISSE 2007 30th International Spring Seminar on Electronics Technology 2007

Pages from

238

Pages count

4

BibTex

@inproceedings{BUT23809,
  author="Petr {Běťák} and Kamil {Nováček}",
  title="Advanced tunable protective structure against electrostatic discharge",
  booktitle="ISSE 2007 30th International Spring Seminar on Electronics Technology 2007",
  year="2007",
  pages="4"
}