Publication result detail

Optimization of Secondary Electron Detection by Ionization Detector in Environmental SEM

Černoch, P.

Original Title

Optimization of Secondary Electron Detection by Ionization Detector in Environmental SEM

English Title

Optimization of Secondary Electron Detection by Ionization Detector in Environmental SEM

Type

Paper in proceedings (conference paper)

Original Abstract

The article deals with results of optimization of secondary electron detection by an ionization detector in the environmental scanning electron microscope. The ionization detectors consisting of a varied electrode geometry and varied voltages on these electrodes, named segmental ionization detectors, are presented as a possibility to reach desired contrasts in a specimen image. In this work, images acquired by several detectors demonstrate detection of different types of signal electrons utilizing a specimen containing thin surface layers and a specimen made for a material contrast measurement. The segmental ionization detector optimized for true secondary electron detection is in the main focus.

English abstract

The article deals with results of optimization of secondary electron detection by an ionization detector in the environmental scanning electron microscope. The ionization detectors consisting of a varied electrode geometry and varied voltages on these electrodes, named segmental ionization detectors, are presented as a possibility to reach desired contrasts in a specimen image. In this work, images acquired by several detectors demonstrate detection of different types of signal electrons utilizing a specimen containing thin surface layers and a specimen made for a material contrast measurement. The segmental ionization detector optimized for true secondary electron detection is in the main focus.

Keywords

Environmental scanning electron microscope, secondary electrons, segmental ionization detector.

Key words in English

Environmental scanning electron microscope, secondary electrons, segmental ionization detector.

Authors

Černoch, P.

Released

03.05.2007

Publisher

Faculty of Electrical Engineering, Czech Technical University in Prague

Book

Proceedings of 11th International Student Conference on Electrical Engineering POSTER 2007

Pages from

1

Pages count

4

BibTex

@inproceedings{BUT23085,
  author="Pavel {Černoch}",
  title="Optimization of Secondary Electron Detection by Ionization Detector in Environmental SEM",
  booktitle="Proceedings of 11th International Student Conference on Electrical Engineering POSTER 2007",
  year="2007",
  number="1",
  pages="4",
  publisher="Faculty of Electrical Engineering, Czech Technical University in Prague"
}