Publication result detail

The collection efficiency of the Everhart-Thornley detector of secondary electrons in SEM.

KONVALINA, I.; MÜLLEROVÁ, I.; FRANK, L.

Original Title

The collection efficiency of the Everhart-Thornley detector of secondary electrons in SEM.

English Title

The collection efficiency of the Everhart-Thornley detector of secondary electrons in SEM.

Type

Paper in proceedings (conference paper)

Original Abstract

The Everhart-Thornley (ET) type detector is widely used in SEM for the collection of secondary electrons (SE). At first glance the electrostatic field of the front grid, biased to a positive potential of several hundred volts, might be thought to attract all SE of a kinetic energy below 50 eV or at least near the SE spectrum peak at 1 - 3 eV. However, the detection quantum efficiency (DQE) of such detectors has been found to be significantly lower than one. The DQE depends heavily on the collection efficiency (CE), i.e. the proportion of emitted species that impact on the detector. Preliminary simulations of electron trajectories indicated CE values for the ET detector even below 10 % for small working distances and more detailed results are reported here.

English abstract

The Everhart-Thornley (ET) type detector is widely used in SEM for the collection of secondary electrons (SE). At first glance the electrostatic field of the front grid, biased to a positive potential of several hundred volts, might be thought to attract all SE of a kinetic energy below 50 eV or at least near the SE spectrum peak at 1 - 3 eV. However, the detection quantum efficiency (DQE) of such detectors has been found to be significantly lower than one. The DQE depends heavily on the collection efficiency (CE), i.e. the proportion of emitted species that impact on the detector. Preliminary simulations of electron trajectories indicated CE values for the ET detector even below 10 % for small working distances and more detailed results are reported here.

Keywords

scanning electron microscope, collection efficiency, secondary electrons

Key words in English

scanning electron microscope, collection efficiency, secondary electrons

Authors

KONVALINA, I.; MÜLLEROVÁ, I.; FRANK, L.

Released

22.08.2004

Location

Antwerpy

Book

EMC 2004 - Proceedings of the 13th European Microscopy Congress

Pages from

79

Pages count

2

BibTex

@inproceedings{BUT21737,
  author="Ivo {Konvalina} and Ilona {Müllerová} and Luděk {Frank}",
  title="The collection efficiency of the Everhart-Thornley detector of secondary electrons in SEM.",
  booktitle="EMC 2004 - Proceedings of the 13th European Microscopy Congress",
  year="2004",
  pages="2",
  address="Antwerpy"
}