Publication result detail

Influence of magnetic and electrostatic fields in the specimen vicinity on trajectories of secondary electrons in SEM.

KONVALINA, I.; MÜLLEROVÁ, I.; FRANK, L.

Original Title

Influence of magnetic and electrostatic fields in the specimen vicinity on trajectories of secondary electrons in SEM.

English Title

Influence of magnetic and electrostatic fields in the specimen vicinity on trajectories of secondary electrons in SEM.

Type

Paper in proceedings (conference paper)

Original Abstract

The Everhart-Thornley (ET) type detector is widely used in SEM for collection of secondary electrons (SE). At first glance the electrostatic field of the front grid, biased to a positive potential of several hundred volts, might be thought to attract all SE of kinetic energy below 50 eV or at least those emitted at 1-5 eV, i.e. near the SE spectrum peak. However, the detective quantum efficiency (DQE) of such detectors has been found significantly below one. Due to complicated distribution of electrostatic and magnetic fields around the specimen, which influence the SE trajectories, the DQE depends heavily on the collection efficiency (CE), i.e. the proportion of emitted species that impact on the detector. Preliminary simulations of electron trajectories indicated the CE values for the ET detector even below 0.1 for small working distances while more detailed results are reported here.

English abstract

The Everhart-Thornley (ET) type detector is widely used in SEM for collection of secondary electrons (SE). At first glance the electrostatic field of the front grid, biased to a positive potential of several hundred volts, might be thought to attract all SE of kinetic energy below 50 eV or at least those emitted at 1-5 eV, i.e. near the SE spectrum peak. However, the detective quantum efficiency (DQE) of such detectors has been found significantly below one. Due to complicated distribution of electrostatic and magnetic fields around the specimen, which influence the SE trajectories, the DQE depends heavily on the collection efficiency (CE), i.e. the proportion of emitted species that impact on the detector. Preliminary simulations of electron trajectories indicated the CE values for the ET detector even below 0.1 for small working distances while more detailed results are reported here.

Keywords

magnetic field, electrostatic field, collection efficiency

Key words in English

magnetic field, electrostatic field, collection efficiency

Authors

KONVALINA, I.; MÜLLEROVÁ, I.; FRANK, L.

Released

03.10.2004

Location

BERLIN

Book

Autumn School on Materials Science and Electron Microscopy 2004 - Emerging Microscopy for Advanced Materials Development: Imaging and Spectroscopy on Atomic Scale.

Pages from

24

Pages count

2

BibTex

@inproceedings{BUT21733,
  author="Ivo {Konvalina} and Ilona {Müllerová} and Luděk {Frank}",
  title="Influence of magnetic and electrostatic fields in the specimen vicinity on trajectories of secondary electrons in SEM.",
  booktitle="Autumn School on Materials Science and Electron Microscopy 2004 - Emerging Microscopy for Advanced Materials Development: Imaging and Spectroscopy on Atomic Scale.",
  year="2004",
  pages="2",
  address="BERLIN"
}