Publication result detail

Factors affecting the Collection Efficiency of Secondary Electrons in SEM.

KONVALINA, I.; MÜLLEROVÁ, I.

Original Title

Factors affecting the Collection Efficiency of Secondary Electrons in SEM.

English Title

Factors affecting the Collection Efficiency of Secondary Electrons in SEM.

Type

Paper in proceedings (conference paper)

Original Abstract

The Everhart-Thornley (ET) detector is the most often used type of secondary electron (SE) detector in the Scanning Electron Microscope (SEM). While the overall quality of the final image is influenced by all components of the detection channel, the collection efficiency (CE), which is defined as a ratio of collected SEs to all emitted ones, governs the image contrast and its signal to noise ratio. The detective quantum efficiency (DQE) of such detector has been found significantly below one. The main reason is in complicated distribution of electrostatic and magnetic fields in the specimen vicinity, which strongly influences the secondary electrons trajectories.

English abstract

The Everhart-Thornley (ET) detector is the most often used type of secondary electron (SE) detector in the Scanning Electron Microscope (SEM). While the overall quality of the final image is influenced by all components of the detection channel, the collection efficiency (CE), which is defined as a ratio of collected SEs to all emitted ones, governs the image contrast and its signal to noise ratio. The detective quantum efficiency (DQE) of such detector has been found significantly below one. The main reason is in complicated distribution of electrostatic and magnetic fields in the specimen vicinity, which strongly influences the secondary electrons trajectories.

Keywords

ET detector, secondary electrons, collection efficiency

Key words in English

ET detector, secondary electrons, collection efficiency

Authors

KONVALINA, I.; MÜLLEROVÁ, I.

Released

28.08.2005

Location

DAVOS

Book

Proceedings - Microscopy Conference 2005 - Dreiländertagung /6./

ISBN

1019-6447

Periodical

Microscopy Conference 2005

State

Swiss Confederation

Pages from

48

Pages count

2

BibTex

@inproceedings{BUT21731,
  author="Ivo {Konvalina} and Ilona {Müllerová}",
  title="Factors affecting the Collection Efficiency of Secondary Electrons in SEM.",
  booktitle="Proceedings - Microscopy Conference 2005 - Dreiländertagung /6./",
  year="2005",
  journal="Microscopy Conference 2005",
  pages="2",
  address="DAVOS",
  issn="1019-6447"
}