Publication result detail

Comparison of AFM and optical methods at measuring nanometric surface roughness

OHLÍDAL, I., FRANTA, D., OHLÍDAL, M., VIČAR, M., KLAPETEK, P.

Original Title

Comparison of AFM and optical methods at measuring nanometric surface roughness

English Title

Comparison of AFM and optical methods at measuring nanometric surface roughness

Type

Paper in proceedings (conference paper)

Authors

OHLÍDAL, I., FRANTA, D., OHLÍDAL, M., VIČAR, M., KLAPETEK, P.

Released

01.11.1998

Publisher

Physikalisch-Technische Bunesanstalt Ferrtiungsmestechnik

Location

Braunschweig, Germany

ISBN

3-89701-280-4

Book

PTB - Bericht F-34

Pages from

123

Pages count

7

BibTex

@inproceedings{BUT21567,
  author="Ivan {Ohlídal} and Daniel {Franta} and Miloslav {Ohlídal} and Miroslav {Vičar} and Petr {Klapetek}",
  title="Comparison of AFM and optical methods at measuring nanometric surface roughness",
  booktitle="PTB - Bericht F-34",
  year="1998",
  pages="7",
  publisher="Physikalisch-Technische Bunesanstalt Ferrtiungsmestechnik",
  address="Braunschweig, Germany",
  isbn="3-89701-280-4"
}