Přístupnostní navigace
E-application
Search Search Close
Publication detail
Shestopalov, M. Stará, V. Rejhon, M. Kunc, J.
Original Title
Annealing, design and long-term operation of graphite crucibles for the growth of epitaxial graphene on SiC
Type
journal article in Web of Science
Language
English
Original Abstract
We describe the annealing, geometry, storage, and lifespan of graphite crucibles for the growth of epitaxial graphene on SiC. We monitor residual gas content during the annealing of the as-manufactured graphite crucible before the growth of the first graphene samples. The high-temperature evolution of carbon monoxide points towards the reaction of solid carbon and residual water. Therefore, we propose a procedure consisting of four annealing cycles to eliminate this reaction. The residual gas evolution after long-term storage of well- baked crucibles in the air shows a similar increase in water and carbon monoxide as that in unbaked crucibles. Hence, we propose the crucible storage in argon ambient. Further, we discuss the role of the crucible shape on graphene quality. Namely, we compare the cylindrical semi-closed crucible to the flat opened crucibles. The flow-aided gas exchange in the opened crucible is more beneficial for graphene growth than the diffusion- driven gas exchange in the semi-closed cylindrical crucibles. The flow-aided gas exchange leads to more efficient removal of outgassed residual contaminants, thus outperforming the advantage of increased silicon vapor pressure in the semi-closed cylindrical crucible. We also study the graphite crucible lifespan, showing that the aged crucible leads to the enhanced inhomogeneous strain in graphene.
Keywords
Epitaxial graphene; Silicon carbide; Graphite crucible; Annealing; Residual gases
Authors
Shestopalov, M.; Stará, V.; Rejhon, M.; Kunc, J.
Released
1. 2. 2025
Publisher
ELSEVIER
Location
AMSTERDAM
ISBN
1873-5002
Periodical
JOURNAL OF CRYSTAL GROWTH
Year of study
651
Number
127988
State
Kingdom of the Netherlands
Pages count
10
URL
https://www.sciencedirect.com/science/article/pii/S0022024824004263?via%3Dihub
BibTex
@article{BUT198685, author="Mykhailo {Shestopalov} and Veronika {Stará} and Martin {Rejhon} and Jan {Kunc}", title="Annealing, design and long-term operation of graphite crucibles for the growth of epitaxial graphene on SiC", journal="JOURNAL OF CRYSTAL GROWTH", year="2025", volume="651", number="127988", pages="10", doi="10.1016/j.jcrysgro.2024.127988", issn="1873-5002", url="https://www.sciencedirect.com/science/article/pii/S0022024824004263?via%3Dihub" }