Detail publikačního výsledku

Parylene-bonded micro-fluidic channels for cryogenic experiments at superfluid He-4 temperatures

MIDLIK, S.; GABLECH, I.; GOLEŇA, M.; BRODSKÝ, J.; SCHMORANZER, D.

Original Title

Parylene-bonded micro-fluidic channels for cryogenic experiments at superfluid He-4 temperatures

English Title

Parylene-bonded micro-fluidic channels for cryogenic experiments at superfluid He-4 temperatures

Type

WoS Article

Original Abstract

We present the manufacturing process of a (24.5 × 100) μm2-sized on-chip flow channel intended for flow experiments with normal and superfluid phases of 4He and showcase such a proof-of-concept experiment. This work proves the suitability of chip-to-chip bonding using a thin layer of Parylene-C for cryogenic temperatures as a simpler alternative to other techniques, such as anodic bonding. A monocrystalline silicon chip embeds the etched meander-shaped micro-fluidic channel and a deposited platinum heater and is bonded to a Pyrex glass top. We test the leak tightness of the proposed bonding method for superfluid 4He, reaching temperatures of ≈1.6 K and evaluate its possible effects on flow experiments. We demonstrate that powering an on-chip platinum heater affects the superfluid flow rate by local overheating of a section of the micro-fluidic channel.

English abstract

We present the manufacturing process of a (24.5 × 100) μm2-sized on-chip flow channel intended for flow experiments with normal and superfluid phases of 4He and showcase such a proof-of-concept experiment. This work proves the suitability of chip-to-chip bonding using a thin layer of Parylene-C for cryogenic temperatures as a simpler alternative to other techniques, such as anodic bonding. A monocrystalline silicon chip embeds the etched meander-shaped micro-fluidic channel and a deposited platinum heater and is bonded to a Pyrex glass top. We test the leak tightness of the proposed bonding method for superfluid 4He, reaching temperatures of ≈1.6 K and evaluate its possible effects on flow experiments. We demonstrate that powering an on-chip platinum heater affects the superfluid flow rate by local overheating of a section of the micro-fluidic channel.

Keywords

Superfluids; Cryogenics; Microfluidic devices

Key words in English

Superfluids; Cryogenics; Microfluidic devices

Authors

MIDLIK, S.; GABLECH, I.; GOLEŇA, M.; BRODSKÝ, J.; SCHMORANZER, D.

RIV year

2025

Released

01.03.2024

Publisher

AIP Publishing

Location

Melville, NY

ISBN

0034-6748

Periodical

REVIEW OF SCIENTIFIC INSTRUMENTS

Volume

95

Number

3

State

United States of America

Pages count

8

URL

https://pubs.aip.org/aip/rsi/article/95/3/033901/3268098/Parylene-bonded-micro-fluidic-channels-for?searchresult=1

Full text in the Digital Library

http://hdl.handle.net/

BibTex

@article{BUT188206,
  author="MIDLIK, S. and GABLECH, I. and GOLEŇA, M. and BRODSKÝ, J. and SCHMORANZER, D.",
  title="Parylene-bonded micro-fluidic channels for cryogenic experiments at superfluid He-4 temperatures",
  journal="REVIEW OF SCIENTIFIC INSTRUMENTS",
  year="2024",
  volume="95",
  number="3",
  pages="8",
  doi="10.1063/5.0162532",
  issn="0034-6748",
  url="https://pubs.aip.org/aip/rsi/article/95/3/033901/3268098/Parylene-bonded-micro-fluidic-channels-for?searchresult=1"
}